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Distributed Pressure Sensoring System

  • US 20070107523A1
  • Filed: 10/30/2006
  • Published: 05/17/2007
  • Est. Priority Date: 10/31/2005
  • Status: Abandoned Application
First Claim
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1. A system for sensing and monitoring pressure conditions and variations over an actual or represented surface area of a workpiece in a process chamber comprising:

  • a substrate; and

    a plurality of micro-electrical-mechanical-systems (MEMS) pressure sensors fixed to the substrate.

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