Distributed Pressure Sensoring System
First Claim
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1. A system for sensing and monitoring pressure conditions and variations over an actual or represented surface area of a workpiece in a process chamber comprising:
- a substrate; and
a plurality of micro-electrical-mechanical-systems (MEMS) pressure sensors fixed to the substrate.
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Abstract
A system is provided for sensing and monitoring pressure conditions and variations over an actual or represented surface area of a workpiece in a process chamber. The system includes a substrate and a plurality of micro-electrical-mechanical-systems (MEMS) pressure sensors fixed to the substrate.
27 Citations
26 Claims
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1. A system for sensing and monitoring pressure conditions and variations over an actual or represented surface area of a workpiece in a process chamber comprising:
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a substrate; and
a plurality of micro-electrical-mechanical-systems (MEMS) pressure sensors fixed to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 25, 26)
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17. A method for recording pressure variations across a representative or actual surface of a substrate under vacuum comprising the acts:
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(a) staging a substrate having multiple MEMS pressure sensors fixed thereto in the vessel subject to vacuum;
(b) connecting the substrate to an external monitoring station;
(c) pumping down the vessel;
(d) activating the sensors;
(e) recording the multiple pressure readings; and
(f) calculating the pressure variations from the multiple readings. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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Specification