Plasma etching of tapered structures
First Claim
Patent Images
1. Method of plasma etching of at least parts of a substrate, comprising:
- providing a substrate, applying at least one structured mask comprising openings onto said substrate, and removing material from said substrate at least in said openings by a plasma etching process using a process gas comprising at least one halogenide and oxygen.
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Abstract
The invention relates to a method of plasma etching substrates, in particular of etching tapered passages through substrates, using a process gas comprising at least one halogenide and oxygen.
27 Citations
59 Claims
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1. Method of plasma etching of at least parts of a substrate, comprising:
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providing a substrate, applying at least one structured mask comprising openings onto said substrate, and removing material from said substrate at least in said openings by a plasma etching process using a process gas comprising at least one halogenide and oxygen. - View Dependent Claims (2, 3, 4, 12, 13, 14, 16, 18, 19, 22, 24, 26, 27, 32, 36, 40, 41)
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5-11. -11. (canceled)
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15. (canceled)
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17. (canceled)
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20-21. -21. (canceled)
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23. (canceled)
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25. (canceled)
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28-31. -31. (canceled)
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33-35. -35. (canceled)
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37-39. -39. (canceled)
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42-43. -43. (canceled)
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44. A method for producing an electronic component, comprising:
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providing a substrate of said electronic component;
applying at least one structured mask comprising openings onto said substrate; and
removing material from said substrate at least in said openings by a plasma etching process using a process gas comprising at least one halogenide and oxygen.
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45-58. -58. (canceled)
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59. Photosensitive device comprising at least one array of photosensitive elements defining pixels of said photosensitive device, said photosensitive elements being rear side contacted with amplifiers, characterized in that at least one amplifier is assigned to each pixel.
Specification