Semiconductor device and method for fabricating the same
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Abstract
A spacer layer is formed on a single-crystal substrate and an epitaxially grown layer composed of a group III-V compound semiconductor layer containing a nitride or the like is further formed on the spacer layer. The epitaxially grown layer is adhered to a recipient substrate. The back surface of the single-crystal substrate is irradiated with a light beam such as a laser beam or a bright line spectrum from a mercury vapor lamp such that the epitaxially grown layer and the single-crystal substrate are separated from each other. Since the forbidden band of the spacer layer is smaller than that of the single-crystal substrate, it is possible to separate the thin semiconductor layer from the substrate by decomposing or fusing the spacer layer, while suppressing the occurrence of a crystal defect or a crack in the epitaxially grown layer.
8 Citations
36 Claims
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1-34. -34. (canceled)
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35. A semiconductor device comprising:
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a substrate;
a semiconductor layer provided on the substrate and including an active layer serving as a light-emitting region; and
a multiple quantum well layer provided on the semiconductor layer, composed of quantum well layers and barrier layers which are alternately stacked, wherein both the semiconductor layer and the multiple quantum well layer have a nitride semiconductor layer. - View Dependent Claims (36)
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Specification