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Stage device and coordinate correction method for the same, exposure apparatus, and device manufacturing method

  • US 20070109522A1
  • Filed: 10/23/2006
  • Published: 05/17/2007
  • Est. Priority Date: 10/24/2005
  • Status: Active Grant
First Claim
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1. A stage device, comprising:

  • a base;

    a movable table arranged on the base;

    a position information measurement device that measures position information of the movable table; and

    a deformation amount detection device that detects an amount regarding deformation of at least one of the base and the movable table.

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