Phase unwrapping method, program, and interference measurement apparatus

• US 20070110334A1
• Filed: 04/20/2006
• Published: 05/17/2007
• Est. Priority Date: 11/17/2005
• Status: Active Grant

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Tsukahara, Hiroyuki, Takahashi, Fumiyuki
• Granted Patent: US 7,593,596 B2
• Time in Patent Office: Days
• US Class Current: 382/276
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 9/02079 Quadrature detection, i.e. detecting relatively phase-shifted signals
• CPC Class Codes: G01B 9/02087 Combining two or more images of the same region

Abstract

A candidate pixel generating unit searches a path-undetermined adjacent pixel j which is adjacent around a parent pixel i, and, with respect to the searched adjacent pixel j, generates a candidate pixel having data {j(i,|Wij|)} in which the parent pixel i and magnitude |Wij| of a phase difference Wij in which phase skip between the pixels is corrected are combined. The registration control unit registers the pixel to a heap having a function of ordering the registration order, and order the pixel, if the weight |Wij| is equal to or more than a predetermined threshold value TH; and registers the pixel to a queue not having the function of ordering the registration order if it is less than the threshold value TH. A path determination unit prioritizes the queue to retrieve and eliminate one candidate pixel, and determines a path between the eliminated candidate pixel and the parent pixel.

Claims

1. A phase unwrapping method of generating a wrapping phase distribution in which pixels of wrapped phases are two-dimensionally disposed according to an interference fringe image of a measurement object, and determining an unwrapping path connecting pixels of unwrapped phases according to the wrapping phase distribution;

the phase unwrapping method characterized by having

a candidate pixel generating step of setting a starting pixel or a path-determined latest pixel as a parent pixel, searching a path-undetermined adjacent pixel which is adjacent around the parent pixel, and generating, with respect to the searched adjacent pixel, a candidate pixel having pixel data in which the parent pixel and a weight which is magnitude of a phase difference in which phase skip between the pixels is corrected are combined;

a registration control step of, if the weight of the candidate pixel is equal to or more than a predetermined threshold value, registering the pixel to a first data registration unit having a function of ordering the registration order and ordering the pixel based on the weight, and, if it is less than the threshold value, registering the pixel to a second data registration unit not having the function of ordering the registration order; and

a path determination step of, every time the process in which all the adjacent pixel around the parent pixel is set as the candidate pixel is finished, retrieving and eliminating one candidate pixel in accordance with the registration order from the second data registration unit if the candidate pixels are present in the first data registration unit and the second data registration unit or if the candidate pixel is present merely in the second data registration unit, retrieving and eliminating the candidate pixel having an ordered minimum weight if the candidate pixel is present merely in the first data registration unit, determining a path between the eliminated candidate pixel and the parent pixel, and passing the eliminated pixel to the candidate pixel generating step as a next parent pixel.

2. The method according to claim 1, characterized in that, in the registration control step, if the weight of the candidate pixel generated in the candidate pixel generating step is less than the threshold value, and the same candidate pixel is registered in the first data registration unit, the registered candidate pixel of the first data registration unit is moved to the second data registration unit, and the parent pixel is rewritten by the parent pixel of the candidate pixel generated in the candidate pixel generating step.

3. The method according to claim 1, characterized in that, in the registration control step, if the weight of the candidate pixel generated in the candidate pixel generating step is equal to or more than the threshold value, and the same candidate pixel is registered in the first registration unit;

and

if the weight of the registered candidate pixel is large, after the pixel is rewritten by the parent pixel and the weight of the candidate pixel generated in the candidate pixel generating step, the pixel is ordered, and

if the weight of the registered candidate pixel is small, the candidate pixel generated in the candidate pixel generating step is discarded, and the registered candidate pixel is caused to remain.

4. The method according to claim 1 characterized in that, in the registration control step, if the weight of the candidate pixel generated in the candidate pixel generating step is less than the threshold value, and the same candidate pixel is registered in the second data registration unit,

the candidate pixel generated in the candidate pixel generating step is discarded, and the registered candidate pixel is caused to remain.

5. The method according to claim 1, characterized in that the first data registration unit is a heap.

6. The method according to claim 1, characterized in that the second data registration unit is a queue having a first-in first-out function or a stack having a first-in last-out function.

7. The method according to claim 1, characterized by further having a threshold value setting step of variably setting the threshold value used in the registration control step.

8. The phase unwrapping method described in claim 7, characterized in that, in the threshold value setting step, an optimal threshold value is determined based on variation information of phases of a phase distribution obtained from an interference fringe image of a predetermined sample.

9. The phase unwrapping method described in claim 7, characterized in that in the threshold value setting step, with respect to the determined unwrapping path of the measurement object, a phase difference after unwrapping and a phase difference according to an unwrapping correction calculation are compared with each other with respect to adjacent pixels which are not the unwrapping path, and unwrapping failure is determined when the discrepant pixels exceed a predetermined number;

and, when the number of times of unwrapping failure exceeds a predetermined number of times, the threshold value used for determination of the unwrapping path is lowered, and the process of determining an unwrapping path is retried.

10. A computer-readable storage medium which stores a phase unrapping program characterized by causing a computer of an interference measurement apparatus for generating a wrapping phase distribution in which pixels of wrapped phases are two-dimensionally disposed according to an interference fringe image of a measurement object, and determining an unwrapping path connecting pixels of unwrapped phases according to the wrapping phase distribution, to execute

a candidate pixel generating step of setting a starting pixel or a path-determined latest pixel as a parent pixel, searching a path-undetermined adjacent pixel which is adjacent around the parent pixel, and generating, with respect to the searched adjacent pixel, a candidate pixel having pixel data in which the parent pixel and a weight which is magnitude of a phase difference in which phase skip between the pixels is corrected are combined;

a registration control step of, if the weight of the candidate pixel is equal to or more than a predetermined threshold value, registering the pixel to a first data registration unit having a function of ordering the registration order and ordering the pixel based on the weight, and, if it is less than the threshold value, registering the pixel to a second data registration unit not having the function of ordering the registration order; and

a path determination step of, every time the process in which all the adjacent pixel around the parent pixel is set as the candidate pixel is finished, retrieving and eliminating one candidate pixel in accordance with the registration order from the second data registration unit if the candidate pixels are present in the first data registration unit and the second data registration unit or if the candidate pixel is present merely in the second data registration unit, retrieving and eliminating the candidate pixel having an ordered minimum weight if the candidate pixel is present merely in the first data registration unit, determining a path between the eliminated candidate pixel and the parent pixel, and passing the eliminated pixel to the candidate pixel generating step as a next parent pixel.

11. The strage medium according to claim 10, characterized in that, in the registration control step, if the weight of the candidate pixel generated in the candidate pixel generating step is less than the threshold value, and the same candidate pixel is registered in the first data registration unit, the registered candidate pixel of the first data registration unit is moved to the second data registration unit, and the parent pixel is rewritten by the parent pixel of the candidate pixel generated in the candidate pixel generating step.

12. The strage medium according to claim 10, characterized in that, in the registration control step, if the weight of the candidate pixel generated in the candidate pixel generating step is equal to or more than the threshold value, and the same candidate pixel is registered in the first registration unit;

and

if the weight of the registered candidate pixel is large, after the pixel is rewritten by the parent pixel and the weight of the candidate pixel generated in the candidate pixel generating step, the pixel is ordered, and

if the weight of the registered candidate pixel is small, the candidate pixel generated in the candidate pixel generating step is discarded, and the registered candidate pixel is caused to remain.

13. The strage medium according to claim 10 characterized in that, in the registration control step, if the weight of the candidate pixel generated in the candidate pixel generating step is less than the threshold value, and the same candidate pixel is registered in the second data registration unit,

the candidate pixel generated in the candidate pixel generating step is discarded, and the registered candidate pixel is caused to remain.

14. The strage medium according to claim 10, characterized in that the first data registration unit is a heap.

15. The strage medium according to claim 10, characterized in that the second data registration unit is a queue having a first-in first-out function or a stack having a first-in last-out function.

16. The strage medium according to claim 10, characterized by further having a threshold value setting step of variably setting the threshold value used in the registration control step.

17. An interference measurement apparatus for generating a wrapping phase distribution in which pixels of wrapped phases are two-dimensionally disposed according to an interference fringe image of a measurement object, and determining an unwrapping path connecting pixels of unwrapped phases according to the wrapping phase distribution;

the interference measurement apparatus characterized by having

a first data registration unit having a function of ordering the registration order of registered information;

a second data registration unit not having the function of ordering the registration order of registered information;

a candidate pixel generating unit for setting a starting pixel or a path-determined latest pixel as a parent pixel, searching a path-undetermined adjacent pixel which is adjacent around the parent pixel, and generating, with respect to the searched adjacent pixel, a candidate pixel having pixel data in which the parent pixel and a weight which is magnitude of a phase difference in which phase skip between the pixels is corrected are combined;

a registration control unit for, if the weight of the candidate pixel is equal to or more than a predetermined threshold value, registering the pixel to a first data registration unit and ordering the pixel based on the weight, and, if it is less than the threshold value, registering the pixel to a second data registration unit; and

a path determination unit for, every time the process in which all the adjacent pixel around the parent pixel is set as the candidate pixel is finished, retrieving and eliminating one candidate pixel in accordance with the registration order from the second data registration unit if the candidate pixels are present in the first data registration unit and the second data registration unit or if the candidate pixel is present merely in the second data registration unit, retrieving and eliminating the candidate pixel having an ordered minimum weight if the candidate pixel is present merely in the first data registration unit, determining a path between the eliminated candidate pixel and the parent pixel, and passing the eliminated pixel to the candidate pixel generating unit as a next parent pixel.

18. The apparatus accordint to claim 17, characterized in that, if the weight of the candidate pixel generated in the candidate pixel generating unit is less than the threshold value, and the same candidate pixel is registered in the first data storage unit, the registration control unit moves the registered candidate pixel of the first data registration unit to the second data registration unit, and rewrites the parent pixel by the parent pixel of the candidate pixel generated in the candidate pixel generating unit.

19. The apparatus accordint to claim 17, characterized in that the first data registration unit is a heap, and the second data registration unit is a queue having a first-in first-out function or a stack having a first-in last-out function.