System and method for positioning and synthesizing of nanostructures

• US 20070110639A1
• Filed: 10/16/2006
• Published: 05/17/2007
• Est. Priority Date: 10/14/2005
• Status: Abandoned Application

• Current Assignee: Penn State Research Foundation
• Original Assignee: Pennsylvania State University
• Inventors: Fonash, Stephen, Joshi, Sanjay, Garg, Pranav, Nam, Wook
• Application Number:
  US11/581,080
• Publication Number:
  US 20070110639A1
• Time in Patent Office: Days
• US Class Current: 422/130
• CPC Class Codes: B01J 31/124 Silicones or siloxanes or comprising such units
• CPC Class Codes: B01J 35/0013 Colloids
• CPC Class Codes: B01J 35/23 in a colloidal state
• CPC Class Codes: B81B 2207/07 Interconnects
• CPC Class Codes: B81C 1/00492 Processes for surface micromachining not provided for in groups B81C1/0046 - B81C1/00484
• CPC Class Codes: B81C 2201/0183 Selective deposition
• CPC Class Codes: B81C 3/002 Aligning microparts
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C25D 1/006 Nanostructures, e.g. using aluminium anodic oxidation templates [AAO]
• CPC Class Codes: C25D 1/04 Wires; Strips; Foils
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

The invention relates to a method of forming at least one nano-structure with a reusable template structure having a channel. The method includes introducing at least one reagent into the channel, and reacting the at least one reagent to form a nano-structure within the channel. The nano-structure forming channel may be positioned in alignment with one or more electrode structures, which may be positioned within or upon the substrate, may be embedded in the reusable template structure, and/or may be external electrode structures positioned outside of the reusable template structure and independent of the substrate. In addition, the electrode structures may be a source material for the formation of the nano-structure in the channel.

Claims

1. A method of forming at least one nano-structure, comprising:

positioning a reusable template structure on a substrate, the reusable template structure including at least one nano-structure forming channel, the nano-structure forming channel being positioned in alignment with at least two electrode structures;

introducing at least one reagent into the channel; and

reacting the at least one reagent to form a nano-structure within the channel.

2. The method of claim 1, wherein at least one of the electrode structures is positioned within or upon the substrate.

3. The method of claim 1, wherein at least one of the electrode structures is embedded in the reusable template structure.

4. The method of claim 1, wherein at least one of the electrode structures is an external electrode structure positioned outside of the reusable template structure and independent of the substrate.

5. The method of claim 1, wherein at least one electrode structure is a source material for the formation of the nano-structure in the channel.

6. The method of claim 1, wherein the reagent comprises at least one of a polymerization monomer, organic molecule, metal catalyst, and an electrolyte.

7. The method of claim 6, wherein the reagent is an aniline monomer.

8. The method of claim 1, wherein the reacting step includes at least one of electrochemical reaction, electrodeposition, electroplating, and electropolymerization.

9. The method of claim 1, further comprising a step of introducing a catalyst into the channel prior to the step of introducing at least one reagent.

10. The method of claim 9, wherein the catalyst comprises one or more nanocolloid particles.

11. The method of claim 10, wherein the nanocolloids comprise metal nanocolloids.

12. The method of claim 1, further comprising repositioning the reusable template structure after the nano-structure is formed.

13. The method of claim 12, wherein the repositioning of the reusable template structure comprises stepping the reusable template structure to a different position on the substrate.

14. The method of claim 12, wherein the repositioning of the reusable template structure comprises stepping the reusable template structure to a new substrate.

15. The method of claim 9, wherein the reagent is SiH₄.

16. The method of claim 9, wherein the reacting step includes low-pressure chemical vapor deposition.

17. A method of forming at least one nano-structure, comprising:

positioning a reusable template structure on a substrate, the reusable template structure including at least one nano-structure forming channel;

introducing at least one reagent into the channel; and

forming a nano-structure within the channel.

18. The method of claim 17, wherein the reacting step includes low-pressure chemical vapor deposition.

19. The method of claim 17, wherein the reagent is SiH₄.

20. The method of claim 17, further comprising repositioning the reusable template structure after the nano-structure is formed.

21. The method of claim 20, wherein the repositioning of the reusable template structure comprises stepping the reusable template structure to a different position on the substrate.

22. The method of claim 20, wherein the repositioning of the reusable template structure comprises stepping the reusable template structure to a new substrate.