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Excitation in Micromechanical Devices

  • US 20070111362A1
  • Filed: 10/06/2006
  • Published: 05/17/2007
  • Est. Priority Date: 11/04/2005
  • Status: Active Grant
First Claim
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1. A resonant structure for a micromechanical device, the resonant structure comprising:

  • a crystalline silicon beam; and

    at least one mass attached to the beam;

    wherein motion of the resonant structure predominantly occurs within an excitation plane, and the beam includes crystal axes aligned such that no crystal axis is parallel to the length of the beam and/or no crystal axis is normal to the excitation plane.

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