Multiple axis accelerometer
First Claim
1. A sensor for measuring acceleration in three mutually orthogonal X, Y, and Z directions, the sensor comprising:
- a first substrate including a base which is substantially parallel to a X-Y sensing plane;
a proof mass disposed in the X-Y sensing plane and constrained to move substantially in the X, Y, and Z directions by a linkage, thereof mass being responsive to accelerations in the X, Y and Z directions;
a pivot on the linkage;
a paddle disposed in the X-Y sensing plane and attached to the linkage the paddle being separate from the proof mass and being configured to rotate about a X axis or a Y axis along the pivot responsive to Z directional acceleration of the proof mass; and
a first plurality of electrodes fixed to the base and configured to respectively sense displacement of the proof mass responsive to X directional acceleration and Y directional acceleration of the proof mass; and
a second substrate including a second plurality of electrodes, the second plurality of electrodes configured to sense the Z directional acceleration of the proof mass;
1 Assignment
0 Petitions
Accused Products
Abstract
A sensor for measuring acceleration in three mutually orthogonal axes, X, Y and Z is disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to move substantially in the X, Y, and Z, about by at least one linkage and is responsive to accelerations in the X, Y and Z directions. The sensor includes at least one paddle disposed in the sensing plane; and at least one pivot on the linkage. Finally, the sensor includes at least one electrode at the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the acceleration.
41 Citations
50 Claims
-
1. A sensor for measuring acceleration in three mutually orthogonal X, Y, and Z directions, the sensor comprising:
-
a first substrate including a base which is substantially parallel to a X-Y sensing plane;
a proof mass disposed in the X-Y sensing plane and constrained to move substantially in the X, Y, and Z directions by a linkage, thereof mass being responsive to accelerations in the X, Y and Z directions;
a pivot on the linkage;
a paddle disposed in the X-Y sensing plane and attached to the linkage the paddle being separate from the proof mass and being configured to rotate about a X axis or a Y axis along the pivot responsive to Z directional acceleration of the proof mass; and
a first plurality of electrodes fixed to the base and configured to respectively sense displacement of the proof mass responsive to X directional acceleration and Y directional acceleration of the proof mass; and
a second substrate including a second plurality of electrodes, the second plurality of electrodes configured to sense the Z directional acceleration of the proof mass;
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 26, 27, 28, 29, 30, 31)
-
-
15. A sensor for measuring acceleration in three mutually orthogonal X, Y, and Z directions, the comprising:
-
a first substrate including a base which is substantially parallel to a X-Y sensing plane;
a proof mass disposed in the X-Y sensing plane and constrained to move substantially in the X, Y, and Z directions by a linkage the proof mass being responsive to accelerations in the X, Y and Z directions;
a pivot on the linkage;
a paddle disposed in the X-Y sensing plane and attached to the linkage, the paddle being separate from the proof mass and being configured to rotate about a X axis or a Y axis along the pivot responsive to Z directional acceleration of the proof mass; and
a first plurality of electrodes fixed to the base and configured to respectively sense displacement of the proof mass responsive to X directional acceleration and Y directional acceleration of the proof mass, and a silicon reference wafer comprising a second substrate, the silicon reference wafer having a top surface attached to the base of the first substrate, the second substrate including a second plurality of electrodes configured to sense the Z directional acceleration of the proof mass, wherein the first substrate and the base are etched from a single silicon sensor wafer. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
-
-
32. A sensor for measuring acceleration in three mutually orthogonal X, Y, and Z directions, the sensor comprising:
-
a first substrate including a base which is substantially parallel to a X-Y sensing plane;
a proof mass disposed in the X-Y sensing plane and constrained to move substantially in the X, Y, and Z directions by a linkage, the proof mass being responsive to accelerations in the X, Y and Z directions;
a pivot on the linkage;
a paddle disposed in the X-Y sensing plane and attached to the linkage, the paddle being separate from the proof mass and being configured to rotate about a X axis or a Y axis along the pivot responsive to Z directional acceleration of the proof mass; and
a first plurality of electrodes fixed to the base and configured to respectively sense displacement of the proof mass responsive to X directional acceleration and Y directional acceleration of the proof mass, and a silicon reference wafer comprising a second substrate, the silicon reference wafer having a top surface attached to the base of the first substrate, the second substrate including a second plurality of electrodes configured to sense the Z directional acceleration of the proof mass, wherein the first substrate and the base are etched from a single silicon sensor wafer; and
a cap wafer having a bottom surface attached to the base of the first substrate. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
-
Specification