Plasma processing equipment
First Claim
1. A plasma processing equipment comprising:
- a plasma generation chamber in which a substrate to be processed is housed and plasma is generated;
an antenna arranged in an opening of an upper part of said plasma generation chamber to produce an electromagnetic field generated by a microwave; and
a top plate mounted under said antenna to seal the opening of said plasma generation chamber, wherein said top plate comprises a concave and convex configuration on its lower surface, and a convex portion of said concave and convex configuration comprises a ring-shaped ridge formed on the lower surface of said top plate.
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Accused Products
Abstract
Resonance can be surely provided under any plasma condition in such a manner that an antenna (3) is arranged in an opening of an upper part of a chamber (1) to produce an electromagnetic field generated by a microwave, a top plate (4) for sealing the opening of the chamber (1) is provided under the antenna (3), a ring-shaped ridge (41) is provided on a lower surface of the top plate (4) such that a thickness thereof in a diameter direction is tapered so as to be varied sequentially. Thus, only one kind of top plate has the same effect as a top plate having various thicknesses, so that absorption efficiency to the plasma can be considerably improved and the plasma can be generated stably over a range from a high pressure to a low pressure.
266 Citations
18 Claims
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1. A plasma processing equipment comprising:
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a plasma generation chamber in which a substrate to be processed is housed and plasma is generated;
an antenna arranged in an opening of an upper part of said plasma generation chamber to produce an electromagnetic field generated by a microwave; and
a top plate mounted under said antenna to seal the opening of said plasma generation chamber, wherein said top plate comprises a concave and convex configuration on its lower surface, and a convex portion of said concave and convex configuration comprises a ring-shaped ridge formed on the lower surface of said top plate. - View Dependent Claims (2, 4, 6, 7, 11, 12, 13, 14, 15, 16, 17, 18)
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3. (canceled)
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5. (canceled)
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8. A plasma processing equipment comprising:
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a plasma generation chamber in which a substrate to be processed is housed and plasma is generated;
an antenna arranged in an opening of an upper part of said plasma generation chamber to produce an electromagnetic field generated by a microwave; and
a top plate mounted under said antenna to seal the opening of said plasma generation chamber, wherein said top plate comprises a concave and convex configuration on its lower surface, and a convex portion of said concave and convex configuration comprise a plurality of conical convex portions on the lower surface of said top plate in the form of a ring. - View Dependent Claims (9, 10)
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Specification