Inductively-coupled RF power source
First Claim
1. A system for implementing a power source, comprising:
- a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency, said power amplifier also generating a reference phase signal derived from said radio-frequency power signal;
an impedance match that provides said radio-frequency power signal to a plasma coil that has a variable resonance condition;
a phase probe positioned adjacent to said plasma coil to generate a coil phase signal corresponding to said adjustable operating frequency; and
a phase-locked loop device that generates a drive signal to said power amplifier to control said adjustable operating frequency, said drive signal being based upon a phase relationship between said reference phase signal and said coil phase signal, said adjustable operating frequency then tracking said variable resonance condition.
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Accused Products
Abstract
A system and method are disclosed for implementing a power source including a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency. The power amplifier also generates a reference phase signal that is derived from the radio-frequency power signal. An impedance match provides the radio-frequency power signal to a plasma coil that has a variable resonance condition. A phase probe is positioned adjacent to the plasma coil to generate a coil phase signal corresponding to the adjustable operating frequency. A phase-locked loop then generates an RF drive signal that is based upon a phase relationship between the reference phase signal and the coil phase signal. The phase-locked loop provides the RF drive signal to the power amplifier to control the adjustable operating frequency, so that the adjustable operating frequency then tracks the variable resonance condition.
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Citations
21 Claims
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1. A system for implementing a power source, comprising:
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a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency, said power amplifier also generating a reference phase signal derived from said radio-frequency power signal;
an impedance match that provides said radio-frequency power signal to a plasma coil that has a variable resonance condition;
a phase probe positioned adjacent to said plasma coil to generate a coil phase signal corresponding to said adjustable operating frequency; and
a phase-locked loop device that generates a drive signal to said power amplifier to control said adjustable operating frequency, said drive signal being based upon a phase relationship between said reference phase signal and said coil phase signal, said adjustable operating frequency then tracking said variable resonance condition. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for implementing a power source, comprising:
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generating a radio-frequency power signal with an adjustable operating frequency by utilizing a power amplifier that also generates a reference phase signal derived from said radio-frequency power signal;
utilizing an impedance match to provide said radio-frequency power signal to a plasma coil that has a variable resonance condition;
positioning a phase probe adjacent to said plasma coil to generate a coil phase signal corresponding to said adjustable operating frequency; and
generating a drive signal to said power amplifier from a phase-locked loop device to control said adjustable operating frequency, said drive signal being based upon a phase relationship between said reference phase signal and said coil phase signal, said adjustable operating frequency then tracking said variable resonance condition.
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Specification