Multi-cavity fabry-perot interferometric thin-film sensor with built-in temperature compensation

• US 20070115480A1
• Filed: 04/28/2006
• Published: 05/24/2007
• Est. Priority Date: 11/23/2005
• Status: Active Grant

• Current Assignee: Virginia Tech Intellectual Properties, Inc. (Virginia Polytechnic Institute and State University)
• Original Assignee: Virginia Tech Intellectual Properties, Inc. (Virginia Polytechnic Institute and State University)
• Inventors: Zhang, Yan, Wang, Anbo, Cooper, Kristie
• Granted Patent: US 7,495,772 B2
• Time in Patent Office: Days
• US Class Current: 356/503
• CPC Class Codes: G01B 11/0675 using interferometry
• CPC Class Codes: G01B 2290/25 Fabry-Perot in interferometer, e.g. etalon, cavity
• CPC Class Codes: G01N 2021/7773 Reflection
• CPC Class Codes: G01N 2021/7779 interferometric
• CPC Class Codes: G01N 21/39 using tunable lasers
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods
• CPC Class Codes: G01N 21/7746 the waveguide coupled to a cavity resonator

Abstract

A fiber optic sensor includes at least two Fabry-Perot (FP cavities) defined by at least three partially reflecting surfaces which individually and together are capable of generating different interference spectra which are affected by temperature. One of the FP cavities is formed at an end of the sensor and includes a surface which is capable of supporting a thin film, the optical thickness of which is to be measured. The other FP cavity between the lead-in fiber and the first FP cavity thus does not include the film and can thus independently provide highly accurate temperature information for calibrating the optical length of the second FP cavity and compensation for temperature effects on measurement of the thin film supported thereon, preferably by subtraction of a calibrated temperature-dependent change in optical length of the second FP cavity from the measurement made.

Claims

1. A sensor providing temperature compensation for a measurement of an optical thickness of a film, said sensor comprising

at least three partially reflecting surfaces defining at least first and second Fabry-Perot cavities exhibiting different indices of refraction, one of said partially reflecting surfaces being at an end of said sensor and including a surface associated with said second Fabry-Perot cavity for supporting a film, the optical thickness of which is to be measured.

2. A sensor as recited in claim 1, wherein temperature information is independently provided by said first Fabry-Perot cavity for temperature compensation of measurements made using an interference spectrum produced by said second Fabry-Perot cavity and/or a combination of said first and second Fabry-Perot cavities.

3. A sensor as recited in claim 1, wherein said second Fabry-Perot cavity comprises a reflection fiber.

4. A sensor as recited in claim 1, wherein said second Fabry-Perot cavity consists of a thin film.

5. A sensor as recited in claim 1, wherein said interference spectrum is obtained for each or said first and second Fabry-Perot cavities by time multiplexing.

6. A sensor as recited in claim 1, wherein said interference spectrum is obtained for each or said first and second Fabry-perot cavities by wavelength multiplexing.

7. A sensor as recited in claim 1, wherein said first Fabry-Perot cavity is an air cavity.

8. A sensor as recited in claim 7, wherein said air cavity is defined between a lead-in fiber and a reflection fiber by a silica capillary tube.

9. A sensor as defined in claim 1, wherein said second Fabry-Perot cavity is longer than said first Fabry-Perot cavity.

10. A sensor as recited in claim 1, wherein said film is a multi-layer self-assembled film.

15. A sensor system as recited in claim 1, wherein said interference spectrum is obtained for each or said first and second Fabry-Perot cavities by time multiplexing.

11. A sensor system providing temperature compensation for a measurement of an optical thickness of a film, said sensor system comprising

a sensor having at least three partially reflecting surfaces defining at least first and second Fabry-Perot cavities exhibiting different indices of refraction, one of said partially reflecting surfaces being at an end of said sensor and including a surface associated with said second Fabry-Perot cavity for supporting a film, the optical thickness of which is to be measured.

12. A sensor system as recited in claim 11, wherein temperature information is independently provided by said first Fabry-Perot cavity for temperature compensation of measurements made using an interference spectrum produced by said second Fabry-Perot cavity and/or a combination of said first and second Fabry-Perot cavities.

13. A sensor system as recited in claim 11, wherein said second Fabry-Perot cavity comprises a reflection fiber and a calibrated change in length of said second Fabry-Perot cavity corresponding to said temperature information is subtracted from a measured optical length of said second Fabry-Perot cavity.

14. A sensor system as recited in claim 11, wherein said second Fabry-Perot cavity consists of a thin film.

16. A sensor system as recited in claim 11, wherein said interference spectrum is obtained for each or said first and second Fabry-perot cavities by wavelength multiplexing.

17. A sensor system as recited in claim 11, wherein said first Fabry-Perot cavity is an air cavity.

18. A sensor system as recited in claim 17, wherein said air cavity is defined between a lead-in fiber and a reflection fiber by a silica capillary tube.

19. A sensor system as defined in claim 11, wherein said second Fabry-Perot cavity is longer than said first Fabry-Perot cavity.

20. A sensor system as recited in claim 11, wherein said film is a multi-layer self-assembled film.