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Multi-cavity fabry-perot interferometric thin-film sensor with built-in temperature compensation

  • US 20070115480A1
  • Filed: 04/28/2006
  • Published: 05/24/2007
  • Est. Priority Date: 11/23/2005
  • Status: Active Grant
First Claim
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1. A sensor providing temperature compensation for a measurement of an optical thickness of a film, said sensor comprising at least three partially reflecting surfaces defining at least first and second Fabry-Perot cavities exhibiting different indices of refraction, one of said partially reflecting surfaces being at an end of said sensor and including a surface associated with said second Fabry-Perot cavity for supporting a film, the optical thickness of which is to be measured.

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