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Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant

  • US 20070115530A1
  • Filed: 12/22/2005
  • Published: 05/24/2007
  • Est. Priority Date: 11/23/2005
  • Status: Active Grant
First Claim
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1. A process for forming a micromechanical device assembly, the process comprising:

  • providing a lid assembly having one or more walls;

    providing a base;

    forming a micromechanical device that includes;

    a moveable component having a first contact surface, wherein the first contact surface interacts with a second contact surface during device operation;

    forming a processing region by bonding the lid assembly to the base;

    positioning the micromechanical device in the processing region; and

    providing a gas-phase lubricant within the processing region at a pressure greater than or equal to atmospheric pressure, wherein the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface.

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