Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
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Abstract
One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.
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Citations
26 Claims
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1-13. -13. (canceled)
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14. A method of operating a micromechanical device comprising:
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providing a micromechanical device that comprises;
a first contact surface;
an electrode coupled to a base; and
a mirror coupled to the base and having a conductive region, a reflective mirror surface and a second contact surface, wherein the second contact surface interacts with the first contact surface during device operation; and
a power supply that is in electrical communication with the conductive region and the electrode;
exposing the reflective mirror surface to optical radiation delivered from a light source;
biasing the electrode relative to the conductive region to a potential that causes the mirror to move to a desired position and that causes the first contact surface to interact with the second contact surface; and
disposing a gas-phase lubricant between the first contact surface and the second contact surface, wherein the gas-phase lubricant is adapted to reduce stiction between the first contact surface and the second contact surface. - View Dependent Claims (15, 16, 17)
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18. A method of operating a micromechanical device comprising:
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providing a micromechanical device that comprises;
a first contact surface; and
a moveable component having a second contact surface, wherein the second contact surface interacts with the first contact surface during device operation;
causing the second contact surface of the moveable component to interact repeatedly with the first contact surface; and
disposing a gas-phase lubricant between the first contact surface and the second contact surface, wherein the gas-phase lubricant is adapted to reduce stiction between the first contact surface and the second contact surface. - View Dependent Claims (19, 20, 21)
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22. A method of operating a micromechanical device comprising:
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providing a micromechanical device that comprises;
a first contact surface; and
a moveable component having a second contact surface, wherein the second contact surface interacts with the first contact surface during device operation;
causing the second contact surface of the moveable component to interact repeatedly with the first contact surface;
disposing a liquid or solid lubricant material on at least one of the first contact surface and the second contact surface; and
disposing a gas-phase lubricant between the first contact surface and the second contact surface, wherein the gas-phase lubricant is adapted to reduce stiction between the first contact surface and the second contact surface. - View Dependent Claims (23, 24, 25, 26)
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Specification