Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant

• US 20070115531A1
• Filed: 03/24/2006
• Published: 05/24/2007
• Est. Priority Date: 11/23/2005
• Status: Active Grant

• Current Assignee: Dongmin Chen, Fulin Xiong
• Original Assignee: Dongmin Chen, Fulin Xiong
• Inventors: Chen, Dongmin, Xiong, Fulin
• Granted Patent: US 7,372,615 B2
• Time in Patent Office: Days
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/0005 Anti-stiction coatings
• CPC Class Codes: B81C 1/0096 For avoiding stiction when the device is in use, i.e. after manufacture has been completed
• CPC Class Codes: B81C 2201/112 Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G02B 21/32 Micromanipulators structurally combined with microscopes
• CPC Class Codes: G02B 27/0006 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation G02B1/18 takes precedence; cleaning in general B08B

Abstract

One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.

Claims

1-13. -13. (canceled)

14. A method of operating a micromechanical device comprising:

providing a micromechanical device that comprises;

a first contact surface;

an electrode coupled to a base; and

a mirror coupled to the base and having a conductive region, a reflective mirror surface and a second contact surface,

wherein the second contact surface interacts with the first contact surface during device operation; and

a power supply that is in electrical communication with the conductive region and the electrode;

exposing the reflective mirror surface to optical radiation delivered from a light source;

biasing the electrode relative to the conductive region to a potential that causes the mirror to move to a desired position and that causes the first contact surface to interact with the second contact surface; and

disposing a gas-phase lubricant between the first contact surface and the second contact surface, wherein the gas-phase lubricant is adapted to reduce stiction between the first contact surface and the second contact surface.

15. The method of claim 14, wherein the gas-phase lubricant is a gas containing a haloalkane.

16. The method of claim 14, wherein the gas-phase lubricant is selected from a group consisting of sulfur hexafluoride, silicon tetrafluoride and perfluorocyclobutane.

17. The method of claim 14, wherein the gas-phase lubricant is a fluorinated compound that has a molecular weight greater than about 100 amu.

18. A method of operating a micromechanical device comprising:

providing a micromechanical device that comprises;

a first contact surface; and

a moveable component having a second contact surface, wherein the second contact surface interacts with the first contact surface during device operation;

causing the second contact surface of the moveable component to interact repeatedly with the first contact surface; and

disposing a gas-phase lubricant between the first contact surface and the second contact surface, wherein the gas-phase lubricant is adapted to reduce stiction between the first contact surface and the second contact surface.

19. The method of claim 18, wherein the gas-phase lubricant is a gas containing a haloalkane.

20. The method of claim 18, wherein the gas-phase lubricant is selected from a group consisting of sulfur hexafluoride, silicon tetrafluoride and perfluorocyclobutane.

21. The method of claim 18, wherein the gas-phase lubricant is a fluorinated compound that has a molecular weight greater than about 100 amu.

22. A method of operating a micromechanical device comprising:

providing a micromechanical device that comprises;

a first contact surface; and

a moveable component having a second contact surface, wherein the second contact surface interacts with the first contact surface during device operation;

causing the second contact surface of the moveable component to interact repeatedly with the first contact surface;

disposing a liquid or solid lubricant material on at least one of the first contact surface and the second contact surface; and

disposing a gas-phase lubricant between the first contact surface and the second contact surface, wherein the gas-phase lubricant is adapted to reduce stiction between the first contact surface and the second contact surface.

23. The method of claim 22, wherein the gas-phase lubricant is a gas containing a haloalkane.

24. The method of claim 22, wherein the gas-phase lubricant is selected from a group consisting of sulfur hexafluoride, silicon tetrafluoride and perfluorocyclobutane.

25. The method of claim 22, wherein the gas-phase lubricant is a fluorinated compound that has a molecular weight greater than about 100 amu.

26. The method of claim 22, wherein the liquid or solid lubricant material is selected from a group consisting of dichlordimethylsilane, octadecyltrichlorsilane, perfluoroctyltrichlorsilane, perfluorodecanoic acid, perfluorodecyl-trichlorosilane, perfluoro-polyether and/or fluoroalkylsilane.