Tri-axis accelerometer
First Claim
1. A micro-electromechanical accelerometer, comprising:
- a substrate;
a first sensor configured to measure an acceleration along a first axis parallel to a plane of the substrate; and
a second sensor configured to measure an acceleration along an axis perpendicular to the plane of the substrate, wherein the second sensor comprises a first beam, a second beam and a single support structure, wherein the single support structure supports the first and second beams relative to the substrate, and wherein the first and second beams circumscribe the first sensor.
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Abstract
In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.
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Citations
41 Claims
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1. A micro-electromechanical accelerometer, comprising:
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a substrate;
a first sensor configured to measure an acceleration along a first axis parallel to a plane of the substrate; and
a second sensor configured to measure an acceleration along an axis perpendicular to the plane of the substrate, wherein the second sensor comprises a first beam, a second beam and a single support structure, wherein the single support structure supports the first and second beams relative to the substrate, and wherein the first and second beams circumscribe the first sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A micro-electromechanical accelerometer, comprising:
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a substrate;
a first sensor comprising a mass and a frame, wherein the mass comprises a first plurality of electrodes and the frame comprises a second plurality of electrodes interdigitated with and electrically coupled to the first plurality of electrodes, wherein the mass moves relative to the frame in response to an acceleration along a first axis parallel to a plane of the substrate causing a measurable change in the electrical coupling between the first and second plurality of electrodes; and
a second sensor comprising a first beam, a second beam and a single support structure, wherein the single support structure supports the first and second beams relative to the substrate, wherein the first beam comprises a third plurality of electrodes and the second beam comprises a fourth plurality of electrodes interdigitated with and electrically coupled to the third plurality of electrodes, wherein the first beam moves relative to the second beam in response to an acceleration along an axis perpendicular to the plane of the substrate causing a measurable change in the electrical coupling between the third and fourth plurality of electrodes, and wherein the first and second beams circumscribe the first sensor. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method for configuring a micro-electromechanical accelerometer, comprising:
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supporting a first sensor relative to a substrate by a single support structure, wherein the first sensor is configured to measure an acceleration along an axis perpendicular to a plane of the substrate, and wherein the first sensor comprises a first beam and a second beam; and
circumscribing a second sensor with the first and second beams of the first sensor, wherein the second sensor is configured to measure an acceleration along a first axis parallel to the plane of the substrate. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41)
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Specification