Transition areas for dense memory arrays
First Claim
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1. A non-volatile memory chip comprising:
- word lines spaced a sub-F (sub-minimum feature size F) width apart; and
extensions of said word lines in at least two transition areas wherein neighboring said extensions in at least one of said transition areas are spaced at least F apart.
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Abstract
A non-volatile memory chip has word lines spaced a sub-F (sub-minimum feature size F) width apart with extensions of the word lines in at least two transition areas. Neighboring extensions are spaced at least F apart. The present invention also includes a method for word-line patterning of a non-volatile memory chip which includes generating sub-F word lines with extensions in transition areas for connecting to peripheral transistors from mask generated elements with widths of at least F.
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Citations
32 Claims
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1. A non-volatile memory chip comprising:
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word lines spaced a sub-F (sub-minimum feature size F) width apart; and
extensions of said word lines in at least two transition areas wherein neighboring said extensions in at least one of said transition areas are spaced at least F apart. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A non-volatile memory chip comprising:
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a densely packed array with spacings between neighboring word lines of less than half the width of one of said word lines;
a loosely packed periphery; and
at least two transition areas connecting word lines of said densely packed array to said loosely packed periphery, wherein each said transition area connects only a portion of said word lines. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for word-line patterning of a non-volatile memory chip, the method comprising:
generating sub-F word lines with extensions in transition areas for connecting to peripheral transistors from mask generated elements with widths of at least a minimum feature size F. - View Dependent Claims (20, 21, 22, 23)
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24. A non-volatile memory chip comprising:
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word lines in a memory array with spacings between neighboring word lines of less than half the width of one of said word lines; and
extensions of said word lines in at least two transition areas wherein neighboring said extensions in at least one of said transition areas are spaced more than the width of one word line apart. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32)
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Specification