Electrostatic control device
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Accused Products
Abstract
An electrostatic actuation device including one mobile electrode, including at least one mobile part with respect to a substrate, at least two electrodes fixed with respect of the substrate, located on a same side of the mobile electrode and each facing a part of the mobile electrode, and at least one pivot with at least of portion of the mobile electrode.
42 Citations
124 Claims
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1-62. -62. (canceled)
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63. An electrostatic actuation device comprising:
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at least one mobile electrode, comprising at least one part free to move with respect to a substrate;
at least two electrodes, fixed with respect to the substrate, located on a same side as the mobile electrode and each facing a part of the mobile electrode; and
means for forming at least one pivot of at least one portion of the mobile electrode, wherein the mobile electrode may bear on the pivot when one of the fixed electrodes attracts the part of the mobile electrode facing the fixed electrode, the other part of the mobile electrode possibly moving away from the substrate by mechanical return forces. - View Dependent Claims (64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 123, 124)
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78. An electrostatic actuation device comprising:
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a mobile part or flexible membrane being mobile or flexible, with respect to a substrate, the part or membrane comprising at least two electrodes, separated by an electrically insulating portion;
at least one electrode, fixed with respect to the substrate, located on a same side of the mobile part or flexible membrane and for which a first part and a second part are located facing one of the corresponding electrodes of the mobile part or flexible membrane; and
means for forming at least one pivot of at least one portion of the mobile part or flexible membrane that may bear on the pivot when one of the fixed electrodes attracts one of the electrodes of the mobile part or flexible membrane, the other mobile electrode being free to move away from the substrate by mechanical return forces. - View Dependent Claims (79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92)
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122. A process according to claim 122, the mobile electrode or membrane being made on the surface of a second substrate then assembled with the first substrate.
Specification