LIQUID DROP DISCHARGE PIEZOELECTRIC DEVICE
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Abstract
A liquid droplet discharging piezoelectric device 1 provided with a cavity member 11 with a built-in cavity 3; an introduction member 13 having introduction channel 5 connecting with the cavity 3; and a nozzle member 12 having nozzle channel 4 connecting with the cavity 3 on a side opposite to the channel 5. This liquid droplet discharging piezoelectric device 1 is provided with an introduction port 6, attached to the introduction member 13, capable of introducing a liquid into the cavity 3 via the introduction channel 5, and a discharge port 7, attached to the nozzle member 12, capable of discharging as droplets a liquid filled in the cavity 3 via the nozzle channel 40. Even in a case where an amount of liquid droplets is of a nanoliter (nl) order, excellent stability and reproducibility are attained, and the unit can stably be operated when attached to an apparatus.
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Citations
54 Claims
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1-27. -27. (canceled)
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28. A liquid droplet discharging piezoelectric device for use in discharging micro liquid droplets provided with:
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a cavity member in which a cavity to be filled with a liquid is built;
an introduction member having an introduction channel which connects with the cavity and an introduction port from which the liquid is introduced into the cavity via the introduction channel; and
a nozzle member having a nozzle channel which connects with the cavity on a side of the cavity member opposite to the introduction channel and a discharge port to discharge the liquid with which the cavity has been filled as droplets via the nozzle channel, wherein at least a part of the cavity member comprises a piezoelectric driving body in which a plurality of layered piezoelectric bodies made of a ceramic material and a plurality of layered electrodes are alternately laminated, at least a part of the introduction member and/or the nozzle member comprises a piezoelectric body made of the ceramic material, and the cavity member, the introduction member and/or the nozzle member is integrally formed by sintering, and wherein a displacement based on an electrically inductive strain of the piezoelectric driving body composing at least a part of the cavity member generates a pressing force accompanied by an increase of a pressure in the cavity of the cavity member; and
the liquid with which the cavity has been filled is discharged as droplets from the discharge port by use of the pressing force. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54)
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Specification