Apparatus for optical inspection of wafers during polishing
First Claim
1. A measurement station for use with a processing machine, which includes a processing station for processing an article and an exit station including an article transfer means and at least one articles'"'"' cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising a spectrophotometric measuring unit and a holding unit for receiving and holding the article in a measuring position during measurements, said measuring unit comprising an optical system including an imaging system operable to locate measurements;
- a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly for separating a first portion of the collected light to propagate towards the spectrophotometric measuring unit and a second portion to propagate to said imaging system.
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Abstract
The present invention is aimed to provide a measurement system installable within a processing equipment and more specifically within the exit station of a polishing machine. The optical scheme of this system includes a spectrophotometric channel, an imaging channel and also means for holding the wafer under measurement.
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Citations
114 Claims
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1. A measurement station for use with a processing machine, which includes a processing station for processing an article and an exit station including an article transfer means and at least one articles'"'"' cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising a spectrophotometric measuring unit and a holding unit for receiving and holding the article in a measuring position during measurements, said measuring unit comprising an optical system including an imaging system operable to locate measurements;
- a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly for separating a first portion of the collected light to propagate towards the spectrophotometric measuring unit and a second portion to propagate to said imaging system.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111)
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112. A measurement station for use with a processing machine, which includes a polisher for polishing an article and an exit station including an article transfer means and at least one articles'"'"' cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising a spectrophotometric measuring unit and a holding unit for receiving and holding the article in a measuring position during measurements, said measuring unit comprising an optical system including an imaging system operable to locate measurements;
- a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly including a pin hole mirror for separating a first portion of the collected light to propagate towards the spectrophotometric measuring unit and a second portion to propagate to said imaging system.
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113. A measurement station for use with a processing machine, which includes a processing station for processing an article and an exit station including an article transfer means and at least one articles'"'"' cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising a spectrophotometric measuring unit, a holding unit for receiving and holding the article in a measuring position during measurements, and a support assembly for supporting the article while transporting it in between said transfer means and said holding unit, said measuring unit being configured and operable to measure a thickness of at least a top layer of the article, said measuring unit comprising an optical system including an imaging system operable to locate measurements;
- a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly for separating a first portion of the collected light to propagate towards the spectrophotometric measuring unit and a second portion to propagate to said imaging system.
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114. A measurement station for use with a processing machine, which includes a processing station for processing an article and an exit station including an article transfer means and at least one articles'"'"' cassette, the measurement station being so dimensioned as to be installable in association with the exit station of the processing machine and comprising a spectrophotometric measuring unit and a holding unit for receiving and holding the article in a measuring position during measurements, said measuring unit being configured and operable to measure a thickness of at least a top layer of the article, said measuring unit comprising an optical system including an imaging system operable to locate measurements;
- a beam directing assembly for directing illuminating light towards the article and directing collected light from the article towards a beam splitting assembly including a pin hole mirror for separating a first portion of the collected light to propagate towards the spectrophotometric measuring unit and a second portion to propagate to said imaging system.
Specification