Method for producing flexible, stretchable, and implantable high-density microelectrode arrays
First Claim
1. A method of forming a microelectrode array for use as an element in implantable medical device comprising:
- providing a bonded structure including a first structure comprising at least a first implantable and biocompatible polymeric layer and a second structure comprising a plurality of conductive features including metallic contact pads, metallic traces, and metallic electrodes, wherein each metallic trace has a zigzag pattern and substantially rounded corners; and
forming a second implantable and biocompatible polymeric layer to said bonded structure, said second polymeric layer covering said plurality of conductive features and has vias therein that extend down to said metallic contact pads and said metallic electrodes.
2 Assignments
0 Petitions
Accused Products
Abstract
A high-density microelectrode array that is flexible and stretchable and can also be implanted within living tissue is provided. The microelectrode array includes at least first and second implantable and biocompatible polymeric layers in which a plurality of patterned conductive features, including metallic contact pads, metallic traces and metallic electrodes are sandwiched therebetween. Each metallic trace is located between a metallic contact pad and a metallic electrode and has substantially rounded corners and a zigzag pattern. The latter features are provided using stent technology. The present invention also provides a method of fabricating such a flexible, stretchable, and implantable microelectrode arrays which combined micromaching technology and stent technology as well as an implantable medical device that includes the inventive microelectrode array.
-
Citations
20 Claims
-
1. A method of forming a microelectrode array for use as an element in implantable medical device comprising:
-
providing a bonded structure including a first structure comprising at least a first implantable and biocompatible polymeric layer and a second structure comprising a plurality of conductive features including metallic contact pads, metallic traces, and metallic electrodes, wherein each metallic trace has a zigzag pattern and substantially rounded corners; and
forming a second implantable and biocompatible polymeric layer to said bonded structure, said second polymeric layer covering said plurality of conductive features and has vias therein that extend down to said metallic contact pads and said metallic electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
- 11. A microelectrode array for use as an element in an implantable medical device comprising at least first and second implantable and biocompatible polymeric layers in which a plurality of patterned conductive features including metallic contact pads, metallic traces and metallic electrodes is sandwiched therebetween, wherein each metallic trace has a zigzag pattern and substantially rounded corners.
-
20. An implantable medical device comprising at least first and second implantable and biocompatible polymeric layers in which a plurality of patterned conductive features including metallic contact pads, metallic traces and metallic electrodes is sandwiched therebetween, wherein each said metallic trace has substantially rounded corners and a zigzag pattern and said second polymeric layer has conductively filled vias that extend down to said metallic contact pad and said metallic electrode.
Specification