DEPOSITION OF LiCoO2
First Claim
1. A method of depositing a LiCoO2 layer, comprising:
- placing a substrate in a reactor;
flowing at least an inert gas through the reactor;
applying pulsed DC power to a sputter target comprising LiCoO2;
positioning said target opposite said substrate;
forming a layer of LiCoO2 over said substrate; and
applying rapid thermal annealing to said substrate and LiCoO2 layer.
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Abstract
In accordance with the present invention, deposition of LiCoO2 layers in a pulsed-dc physical vapor deposition process is presented. Such a deposition can provide a low-temperature, high deposition rate deposition of a crystalline layer of LiCoO2 with a desired (101) or (003) orientation. Some embodiments of the deposition addresses the need for high rate deposition of LiCoO2 films, which can be utilized as the cathode layer in a solid state rechargeable Li battery. Embodiments of the process according to the present invention can eliminate the high temperature (>700° C.) anneal step that is conventionally needed to crystallize the LiCoO2 layer. Some embodiments of the process can improve a battery utilizing the LiCoO2 layer by utilizing a rapid thermal anneal process with short ramp rates.
159 Citations
34 Claims
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1. A method of depositing a LiCoO2 layer, comprising:
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placing a substrate in a reactor;
flowing at least an inert gas through the reactor;
applying pulsed DC power to a sputter target comprising LiCoO2;
positioning said target opposite said substrate;
forming a layer of LiCoO2 over said substrate; and
applying rapid thermal annealing to said substrate and LiCoO2 layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of depositing a lithium metal oxide layer, comprising:
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placing a substrate in a reactor;
flowing at least an inert gas through the reactor;
applying pulsed DC power to a sputter target comprising lithium metal oxide;
positioning said target opposite said substrate;
forming a layer of said lithium metal oxide over said substrate; and
applying rapid thermal annealing to said substrate and lithium metal oxide layer. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification