Multi-zone resistive heater

• US 20070125762A1
• Filed: 12/01/2005
• Published: 06/07/2007
• Est. Priority Date: 12/01/2005
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Yudovsky, Joseph, Smith, Jacob, Tam, Alexander, Cui, Anqing, Tran, Binh, Seutter, Sean, Iyer, R.
• Application Number:
  US11/293,626
• Publication Number:
  US 20070125762A1
• Time in Patent Office: Days
• US Class Current: 219/444.100
• CPC Class Codes: H01L 21/67103 mainly by conduction

Abstract

Apparatus, reactors, and methods for heating substrates are disclosed. The apparatus comprises a stage comprising a body and a surface having an area to support a substrate, a shaft coupled to the stage, a first heating element disposed within a central region of the body of the stage, and at least second and third heating elements disposed within the body of the stage, the at least second and third heating elements each partially surrounding the first heating element and wherein the at least second and third heating elements are circumferentially adjacent to each other.

Claims

1. An apparatus comprising:

a stage comprising a body and a surface having an area to support a substrate;

a shaft coupled to the stage;

a first heating element disposed within a central region of the body of the stage; and

at least second and third heating elements disposed within the body of the stage, the at least second and third heating elements each partially surrounding the first heating element and wherein the at least second and third heating elements are circumferentially adjacent to each other.

2. The apparatus of claim 1 further comprising only one temperature measuring device for controlling the respective temperatures of the heating elements, the temperature measuring device thermally coupled to the central region of the body.

3. The apparatus of claim 1, further comprising at least fourth and fifth heating elements, the second, third, fourth and fifth heating elements substantially defining circumferentially adjacent quadrants that respectively partially surround the first heating element.

4. The apparatus of claim 3, wherein the first heating element is disposed adjacent to a top or a bottom surface of the body, and the second, third, fourth and fifth heating elements are disposed adjacent to the other surface of the body.

5. The apparatus of claim 1, wherein the stage is comprised of material a material adapted to withstand temperatures in excess of at least about 750°

C.

6. The apparatus of claim 5, wherein the stage comprises aluminum nitride.

7. A reactor incorporating the apparatus of claim 1, wherein the reactor includes a chamber adapted for the formation of films on the substrate and the apparatus is located in the chamber.

8. A reactor incorporating the apparatus of claim 4, wherein the reactor includes a chamber adapted for the formation of films on the substrate and the apparatus is located in the chamber.

9. A heating system for a chemical vapor deposition apparatus comprising:

a resistive heater including a body and a stage having a surface with an area to support a substrate;

a shaft coupled to the stage;

a first heating element disposed within a central region of the body of the stage for heating a first zone of the stage; and

at least second and third heating elements disposed within the body of the stage for respectively heating second and third zones of the stage, the at least second and third heating elements each partially surrounding the first heating element and wherein the at least second and third heating elements are circumferentially adjacent to each other;

a temperature sensor for measuring the temperature of the central zone of the stage;

at least first, second and third power sources for respectively providing power to the first, second and third heating elements; and

a control system for controlling the first, second and third power sources.

10. The heating system of claim 9, wherein said temperature sensor is the only temperature sensor used to measure the temperature of the resistive heater and the control system controls the temperature according to an output from the temperature sensor and an algorithm of a power ratio of power to the second and first heating elements and a power ratio of power to the third and the first heating elements.

11. The heating system of claim 9, further comprising at least fourth and fifth heating elements, the second, third, fourth and fifth heating elements substantially defining circumferentially adjacent quadrants that respectively partially surround the first heating element, and at least fourth and fifth power sources controlled by the control system for respectively providing power to the at least fourth and fifth heating elements.

12. The heating system of claim 11;

wherein the first heating element is disposed adjacent to a top or a bottom surface of the body of the resistive heater, and the second, third, fourth and fifth heating elements are disposed adjacent to the other surface of the body of the resistive heater.

13. The heating system of claim 9, wherein the temperature sensor is a thermocouple disposed within the central region of the body of the stage having at least a lead that extends through the shaft.

14. The heating system of claim 9, further comprising at least second and third temperature sensors for measuring the respective temperatures of the second and third zones.

15. The heating system of claim 14, wherein at least one temperature sensor includes a thermocouple.

16. A method for resistive heating of substrates comprising:

dividing a portion of a resistive heating element into a central region and at least two outer regions, each outer region only partially surrounding the central region;

providing each outer region a respective power ratio with respect to the central region;

measuring the temperature of the central region;

providing heating power to the central region according to the measured temperature; and

providing heating power delivered to each outer region according to the heating power delivered to the central region and the respective power ratio of the outer region.

17. The method of claim 16, further comprising performing a calibration procedure to obtain the power ratios.

18. The method of claim 16, further comprising dividing the heating surface into at least four outer regions, each outer region partially surrounding the central region.

19. The method of claim 18, wherein the heating element has a top surface and a bottom surface, and at least one of the central heating region or four outer regions is located on the top surface and one of the central heating region or four outer regions is located on the bottom surface.

20. The method of claim 16, wherein the each outer region is circumferentially adjacent to another outer region.