System and method for pressure compensation in a pump

• US 20070125797A1
• Filed: 11/20/2006
• Published: 06/07/2007
• Est. Priority Date: 12/02/2005
• Status: Active Grant

• Current Assignee: Entegris Incorporated
• Original Assignee: Entegris Incorporated
• Inventors: Cedrone, James, Gonnella, George
• Granted Patent: US 8,029,247 B2
• Time in Patent Office: Days
• US Class Current: 222/14
• CPC Class Codes: F04B 13/00 Pumps specially modified to deliver fixed or variable measured quantities
• CPC Class Codes: F04B 2205/03 Pressure in the compression chamber
• CPC Class Codes: F04B 49/065 and making use of computers
• CPC Class Codes: F04B 49/08 Regulating by delivery pressure
• CPC Class Codes: F04B 51/00 Testing machines, pumps, or pumping installations

Abstract

Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated.

Claims

1. A method, comprising:

introducing fluid into a chamber of a pumping apparatus;

determining if a pressure in the chamber is above a desired pressure;

moving a pumping means of the pumping apparatus to increase the volume of the chamber to compensate for the pressure increase if the pressure in the chamber is above a desired pressure; and

dispensing fluid from the chamber, wherein the determination and movement are repeated to substantially maintain substantially the desired pressure until the dispense of fluid is initiated.

2. The method of claim 1, wherein the desired pressure is a dispense pressure.

3. The method of claim 1, wherein the desired pressure is a fraction of the dispense pressure.

4. The method of claim 1, wherein determining if the pressure in the chamber is above the desired pressure comprises receiving the pressure in the chamber from a pressure sensor and determining if the pressure is within a tolerance of the desired pressure.

5. The method of claim 4, wherein dispensing the fluid further comprises determining a dispense position based on an initial position of the pumping means and moving the pumping means from a position of the pumping means when the dispense is initiated to the dispense position.

6. The method of claim 4, wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and a correction distance based on the distance the pumping means moves to maintain the desired pressure and moving the pumping means the dispense distance plus the correction distance.

7. The method of claim 4, wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and moving the pumping means the dispense distance.

8. The method of claim 4, wherein no determination is made if the pressure is above the desired pressure while the pumping means is moving.

9. The method of claim 4, further comprising disabling the pressure sensor while the pumping means is moving.

10. The method of claim 4, further comprising detecting that the pumping means has stopped moving, before determining if the pressure is within a tolerance of the desired pressure.

11. The method of claim 4, wherein the pressure is received at a sampling rate.

12. The method of claim 11, wherein the sampling rate is around 30 khz, around 10 khz or around 1 khz.

13. The method of claim 4, wherein the pumping means is moved a motor increment.

14. A computer readable medium, comprising instructions translatable for:

introducing fluid into a chamber of a pumping apparatus;

determining if a pressure in the chamber is above a desired pressure;

moving a pumping means of the pumping apparatus to increase the volume of the chamber to compensate for the pressure increase if the pressure in the chamber is above a desired pressure; and

dispensing fluid from the chamber, wherein the determination and movement are repeated to substantially maintain substantially the desired pressure until the dispense of fluid is initiated.

15. The computer readable medium of claim 14, wherein the desired pressure is a dispense pressure.

16. The computer readable medium of claim 14, wherein the desired pressure is a fraction of-the dispense pressure.

17. The computer readable medium of claim 14, wherein determining if the pressure in the chamber is above the desired pressure comprises receiving the pressure in the chamber from a pressure sensor and determining if the pressure is within a tolerance of the desired pressure.

18. The computer readable medium of claim 17, wherein dispensing the fluid further comprises determining a dispense position based on an initial position of the pumping means and moving the pumping means from a position of the pumping means when the dispense is initiated to the dispense position.

19. The computer readable medium of claim 17, wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and a correction distance based on the distance the pumping means moves to maintain the desired pressure and moving the pumping means the dispense distance plus the correction distance.

20. The computer readable medium of claim 17, wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and moving the pumping means the dispense distance.

21. The computer readable medium of claim 17, wherein no determination is made if the pressure is above the desired pressure while the pumping means is moving.

22. The computer readable medium of claim 17, the instructions translatable for:

disabling the pressure sensor while the pumping means is moving.

23. The computer readable medium of claim 17, the instructions translatable for detecting that the pumping means has stopped moving, before determining if the pressure is within a tolerance of the desired pressure.

24. The computer readable medium of claim 17, wherein the pressure is received at a sampling rate.

25. The computer readable medium of claim 24, wherein the sampling rate is around 30 khz, around 10 khz or around 1 khz.

26. The computer readable medium of claim 17, wherein the pumping means is moved a motor increment.

27. A system, comprising

a pumping apparatus comprising a feed chamber, a dispense chamber operable to receive fluid for dispense, a pumping means within the dispense chamber and a pressure sensor operable to sense a pressure in the dispense chamber;

and

a controller configured to receive the pressure, determine if the pressure in the chamber is above a desired pressure, regulate the movement of the pumping means to maintain substantially the desired pressure in the dispense chamber and repeat this receiving, determination and regulation until a dispense of fluid is initiated, wherein the controller is further operable to regulate the movement of the pumping means to dispense fluid from the dispense chamber.

28. The system of claim 27, wherein determining if the pressure in the dispense chamber is above the desired pressure comprises receiving the pressure in the chamber from a pressure sensor and determining if the pressure is within a tolerance of the desired pressure.

29. The system of claim 28, wherein dispensing the fluid further comprises determining a dispense position based on an initial position of the pumping means and regulating the movement of the pumping means such that the pumping means moves from a position of the pumping means when the dispense is initiated to the dispense position.

30. The system of claim 28, wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and a correction distance based on the distance the pumping means moves to maintain the baseline pressure and regulating the movement of the pumping means such that the pumping means moves the dispense distance plus the correction distance.

31. The system of claim 28, wherein dispensing the fluid comprises calculating a dispense distance based upon an initial position of the pumping means and regulating the movement of the pumping means such that the pumping means moves the dispense distance.

32. The system of claim 28, wherein no determination is made if the pressure is above the desired pressure while the pumping means is moving.

33. The system of claim 28, the controller operable to disable the pressure sensor while the pumping means is moving.

34. The system of claim 28, the controller operable to detect that the pumping means has stopped moving, before determining if the pressure is within a tolerance of the desired pressure.

35. The system of claim 28, wherein the pressure is received at a sampling rate.

36. The system of claim 35, wherein the sampling rate is around 30 khz, around 10 khz or around 1 khz.

37. The system of claim 28, wherein the pumping means is regulated to move a motor increment.