Method for preventing or reducing contamination of an immersion type projection apparatus and an immersion type lithographic apparatus
First Claim
1. A method for preventing or reducing contamination of an immersion type projection apparatus, the apparatus comprising at least one immersion space that is at least partially filled with a liquid when the apparatus projects a beam of radiation onto a substrate, the method comprising:
- rinsing at least part of the immersion space with a rinsing liquid before the apparatus is used to project the beam of radiation onto a substrate.
1 Assignment
0 Petitions
Accused Products
Abstract
A method for preventing or reducing contamination of an immersion type projection apparatus is disclosed. The apparatus includes at least one immersion space that is at least partially filled with a liquid when the apparatus projects a beam of radiation onto a substrate. The method includes rinsing at least part of the immersion space with a rinsing liquid before the apparatus is used to project the beam of radiation onto a substrate.
219 Citations
49 Claims
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1. A method for preventing or reducing contamination of an immersion type projection apparatus, the apparatus comprising at least one immersion space that is at least partially filled with a liquid when the apparatus projects a beam of radiation onto a substrate, the method comprising:
rinsing at least part of the immersion space with a rinsing liquid before the apparatus is used to project the beam of radiation onto a substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for preventing or reducing contamination of a lithographic projection apparatus, the apparatus including a substrate holder constructed to hold a substrate, a patterning device holder constructed to hold a patterning device, a projection system, and an immersion system configured to at least partially fill an immersion space of the apparatus with a liquid, the method comprising:
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moving at least one of the immersion system and at least part of the apparatus relative to each other; and
rinsing said at least part of the apparatus with the liquid before the apparatus is used to project a patterned beam of radiation onto a target portion of a substrate. - View Dependent Claims (13, 14, 15, 16)
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17. A method for preventing or reducing contamination of a lithographic projection apparatus, the apparatus including an immersion space, the method comprising:
filling at least part of the immersion space with a rinsing liquid for at least one minute. - View Dependent Claims (18)
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19. A method for preventing or reducing contamination of a lithographic projection apparatus, the apparatus including a substrate holder constructed to hold a substrate, a patterning device holder constructed to hold a patterning device, a projection system, and an immersion space, the method comprising:
filling at least part of the immersion space with a rinsing liquid during an idle time of the apparatus to prevent or reduce substrate contamination during at least one subsequent start-up run of the apparatus. - View Dependent Claims (20)
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21. An immersion type lithographic apparatus comprising:
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at least one immersion space; and
an immersion system configured to at least partially fill the immersion space with a liquid, wherein the apparatus is configured to rinse at least part of the immersion space with a rinsing liquid before the apparatus is used to project a patterned beam of radiation onto a substrate. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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45. An immersion type lithographic apparatus, including at least one storage space or compartment to store at least one dummy substrate or substrate-shaped object in-situ.
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46. An immersion type lithographic apparatus, including at least one storage space or compartment to store at least one dummy patterning device or patterning device-shaped object in-situ.
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47. A computer program containing one or more sequences of machine-readable instructions configured to carry out a method for preventing or reducing contamination of an immersion type projection apparatus when the computer program is being executed by a computer, the apparatus comprising at least one immersion space that is at least partially filled with a liquid when the apparatus projects a beam of radiation onto a substrate, the method comprising rinsing at least part of the immersion space with a rinsing liquid before the apparatus is used to project the beam of radiation onto a substrate.
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48. A method for preventing or reducing contamination of a lithographic projection apparatus comprising a space that is to be provided with a liquid through which a beam of radiation can be transmitted, the method comprising:
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operating the lithographic apparatus; and
subsequently rinsing at least part of the space with a rinsing liquid. - View Dependent Claims (49)
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Specification