Mask blank and photomask having antireflective properties
First Claim
1. A mask blank comprising a substrate and a thin film system provided on the substrate, wherein said thin film system comprises at least three anti reflective layers wherein each of said antireflective layers comprises at least two sublayers of different composition, said mask blank being able of producing a photomask at an exposure light having a wavelength of 300 nm or less.
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Abstract
The present invention relates to mask blanks with anti reflective coatings comprising at least two sublayers. Such bilayer or multilayer anti reflective coatings are advantageous for binary and phase shift mask blanks for use in lithography for an exposure wavelength of 300 nm or less with improved anti reflection properties; and to EUVL mask blanks having improved inspection properties.
51 Citations
48 Claims
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1. A mask blank comprising a substrate and a thin film system provided on the substrate, wherein said thin film system comprises at least three anti reflective layers wherein each of said antireflective layers comprises at least two sublayers of different composition,
said mask blank being able of producing a photomask at an exposure light having a wavelength of 300 nm or less.
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12. A mask blank comprising a substrate and a thin film system provided on the substrate, wherein said thin film system comprises at least one anti reflective layer having at least two sublayers wherein said anti reflective layer comprises a sublayer comprising oxides and/or nitrides of B, Al and/or Ga,
said mask blank being able of producing a photomask at an exposure light having a wavelength of 300 nm or less.
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17. A substrate for a mask blank said mask blank being able of producing a photomask at an exposure light having a wavelength of 300 nm or less;
- wherein said substrate comprises an anti reflective layer on the front side and on the backside of the substrate, wherein said anti reflective layers each comprise at least two sublayers of different composition.
- View Dependent Claims (18, 19, 20, 22, 23)
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21. A substrate for a mask blank said mask blank being able of producing a photomask at an exposure light having a wavelength of 300 nm or less;
- wherein said substrate comprises an anti reflective layer on the front side and/or on the backside of the substrate;
wherein said anti reflective layer comprises at least two sublayers of different composition; and
wherein at least one sublayer comprises oxides and/or nitrides of B, Al and/or Ga.
- wherein said substrate comprises an anti reflective layer on the front side and/or on the backside of the substrate;
- 24. A mask blank comprising a substrate and a thin film system provided on the substrate, wherein said thin film system comprises an absorbing layer and an anti reflective layer on the absorbing layer, wherein said anti reflective layer on the absorbing layer comprises at least two sublayers of different composition, said mask blank being able of producing a photomask at an exposure light having a wavelength of 300 nm or less.
- 30. A mask blank comprising a substrate and a thin film system provided on the substrate, wherein said thin film system comprises a functional layer and an anti reflective layer having at least two sublayers under said functional layer, wherein said anti reflective layer can be etched by the same etching agent as said functional layer, wherein the anti reflective layer comprises at least two sublayers of different composition, said mask blank being able of producing a photomask at an exposure light having a wavelength of 300 nm or less.
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37. An EUVL mask blank comprising a substrate and a thin film system provided on the substrate;
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wherein said thin film system comprises a reflective multilayer stack an absorber layer and wherein on the absorber layer an antireflection layer comprising at least two sublayers is provided, said sublayers comprising a dielectric layer and a semitransparent layer. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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Specification