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Optical Proximity Correction on Hardware or Software Platforms with Graphical Processing Units

  • US 20070130559A1
  • Filed: 12/01/2006
  • Published: 06/07/2007
  • Est. Priority Date: 12/02/2005
  • Status: Active Grant
First Claim
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1. A system comprising:

  • a computing system comprising at least one central processing unit and at least one graphics processing unit;

    a user interface for interacting with the computer system;

    a computer readable medium comprising data describing the size and placement of features to be formed on a photolithography exposure mask used to manufacture semiconductor devices;

    a computer readable medium comprising optical proximity correction calculation procedures for acting upon the data, wherein at least a portion of the optical proximity correction calculation procedures are executed using the graphics processing unit; and

    output devices for displaying the results of applying the optical proximity correction calculation procedures executed using the graphics processing unit upon the data.

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