Transferring die(s) from an intermediate surface to a substrate
First Claim
1. A method of transferring a plurality of integrated circuit dies from a die plate to a substrate, comprising:
- (a) receiving a die plate that has a first surface having a die attached thereto, wherein the die covers a hole through the die plate;
(b) positioning the first surface of the die plate and the substrate to be adjacent to each other such that the die is closely adjacent to a corresponding contact area on a first surface of the substrate; and
(c) applying a stimulus to an actuator to cause the die to be released from the die plate to come into contact with the contact area.
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Accused Products
Abstract
Dies that are attached to a die plate can be transferred to a substrate. An actuator can be used to cause a die to be released from the die plate and to come into contact with the substrate. For example, the die may cover a corresponding hole in the die plate. The actuator can move a pin into the hole in the die plate, thereby pushing the die from the die plate. The actuator may be actuated by an electromagnetic stimulus. For instance, a solenoid having windings around a tubular core may provide the electromagnetic stimulus to the actuator. Current may be provided to the windings of the solenoid to generate the electromagnetic stimulus that actuates the actuator. The actuator may be provided in the tubular core of the solenoid.
94 Citations
21 Claims
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1. A method of transferring a plurality of integrated circuit dies from a die plate to a substrate, comprising:
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(a) receiving a die plate that has a first surface having a die attached thereto, wherein the die covers a hole through the die plate;
(b) positioning the first surface of the die plate and the substrate to be adjacent to each other such that the die is closely adjacent to a corresponding contact area on a first surface of the substrate; and
(c) applying a stimulus to an actuator to cause the die to be released from the die plate to come into contact with the contact area. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of transferring an integrated circuit die from a die plate to a substrate, comprising:
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(a) aligning an actuator pin of an actuator and a hole in a die plate with each other, wherein the hole is covered by a die that is attached to a first surface of the die plate; and
(b) providing an electromagnetic stimulus to the actuator to cause the actuator pin to move into the hole and to detach the die from the first surface. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A system for transferring integrated circuit dies, comprising:
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an actuator that includes a solenoid having windings around a tubular hollow core, and an actuator pin positioned in the tubular hollow core; and
a die plate having a first surface to which a die is attached, wherein the die covers a corresponding hole through the die plate;
wherein the actuator is configured to move the pin through the hole to detach the die from the first surface of the die plate based on an electromagnetic stimulus generated by the solenoid. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. A system to transfer integrated circuit dies, comprising:
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means for actuating a pin aligned with a hole in a die plate, wherein the hole is covered by a die that is attached to a first surface of the die plate; and
means for providing an electromagnetic stimulus to the means for actuating to cause the pin to move into the hole and to detach the die from the first surface.
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Specification