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Gas Supplying unit and substrate processing apparatus

  • US 20070131168A1
  • Filed: 10/27/2006
  • Published: 06/14/2007
  • Est. Priority Date: 10/31/2005
  • Status: Abandoned Application
First Claim
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1. A gas supplying unit to be arranged to hermetically fit in an opening formed at a ceiling part of a processing container for conducting a process to a substrate:

  • the gas supplying unit comprising a plurality of nickel members, wherein a large number of gas-supplying holes is formed at a lower surface of the gas supplying unit, a process gas is adapted to be supplied from the large number of gas-supplying holes into the processing container, and the plurality of nickel members is fixed to each other via an intermediate member for preventing sticking made of a material different from nickel.

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