Washing apparatus with bubbling reaction and a washing method of using bubbling reaction
First Claim
1. A washing apparatus with bubbling reaction, which uses a bubbling reaction to remove organic matter from the surface of a substrate and includes a reaction tank, which is used to place said substrate and provide said substrate with washing space;
- a source for supplying a reaction gas, which connects with said reaction tank and supplies said reaction tank with a reaction gas;
a source for supplying reaction liquid;
a temperature-control system, which connects with said source for supplying reaction liquid, and controls the temperature of said reaction liquid, and then supplies said reaction liquid to said reaction tank;
a bubble-generating means, which generate bubbles in said reaction gas after receiving in the reaction liquid;
a motion unit, which is used to let said substrate generate rotational displacement in said reaction tank;
a pressure-control system, which connects with said reaction tank, controls the pressure in the reaction tank, and extracts said surplus reaction gas from said reaction tank; and
a source for supplying a washing solution, which supplies the washing solution to wash said substrate after said organic matter is removed.
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Accused Products
Abstract
The present invention relates to a washing apparatus with bubbling reaction and a washing method of using bubbling reaction which are based on compression technology of an interface diffusion layer with bubbling, by the aid of using a bubble wall generated by a pneumatic means as a reaction interface in a gas-liquid-solid heterogeneous system and utilizing a pulling force generated by bubbles when climbing up along the surface of a material to be washed, to compress thickness of the liquid-solid interface and optimize mass transfer efficiency in multiphase that can remove organic matter from the material surface.
19 Citations
26 Claims
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1. A washing apparatus with bubbling reaction, which uses a bubbling reaction to remove organic matter from the surface of a substrate and includes
a reaction tank, which is used to place said substrate and provide said substrate with washing space; -
a source for supplying a reaction gas, which connects with said reaction tank and supplies said reaction tank with a reaction gas;
a source for supplying reaction liquid;
a temperature-control system, which connects with said source for supplying reaction liquid, and controls the temperature of said reaction liquid, and then supplies said reaction liquid to said reaction tank;
a bubble-generating means, which generate bubbles in said reaction gas after receiving in the reaction liquid;
a motion unit, which is used to let said substrate generate rotational displacement in said reaction tank;
a pressure-control system, which connects with said reaction tank, controls the pressure in the reaction tank, and extracts said surplus reaction gas from said reaction tank; and
a source for supplying a washing solution, which supplies the washing solution to wash said substrate after said organic matter is removed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 13, 14)
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12. A washing method of using bubbling reaction, which uses a bubbling reaction to remove organic matter from a surface of a substrate and includes the steps of
placing said substrate into a reaction tank and supplying a reaction gas at appropriate concentration and flow rate; -
delivering said reaction gas through a reaction liquid with an appropriate temperature to generate bubbles;
allowing said bubbles climb up along said surface of said substrate and remove said organic matter from said surface of said substrate; and
allowing said substrate conduct a washing procedure by using a washing solution. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification