Lithographic apparatus and device manufacturing method
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Accused Products
Abstract
A lithographic projection apparatus is disclosed in which a space between the projection system and the substrate is filled with a liquid. An edge seal member at least partly surrounds the substrate or other object on a substrate table to prevent liquid loss when edge portions of the substrate or other object are, for example, imaged or illuminated.
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Citations
66 Claims
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1-51. -51. (canceled)
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52. A substrate holding apparatus which contacts an undersurface of a substrate and holds the substrate, at least a portion of a top surface of the substrate being immersed in liquid, said apparatus comprising:
- a chuck unit to attract the substrate; and
a preventing system to prevent the liquid from reaching the undersurface of the substrate. - View Dependent Claims (53, 54, 55, 56, 57)
- a chuck unit to attract the substrate; and
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58. An exposure apparatus, comprising:
- a projection optical system for projecting a pattern of an original onto a substrate;
a liquid application device for applying liquid to the substrate;
a chuck unit for securing the substrate; and
a liquid prevention device for preventing liquid from contacting an undersurface of the substrate.
- a projection optical system for projecting a pattern of an original onto a substrate;
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59. A method of manufacturing a device, comprising the steps of:
- providing a projecting optical system for projecting a pattern of an original onto a substrate;
securing the substrate with a chuck unit;
applying a liquid to the substrate; and
preventing liquid from contacting an undersurface of the substrate.
- providing a projecting optical system for projecting a pattern of an original onto a substrate;
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60. A substrate holding apparatus for securing an underside of a substrate, with at least a portion of a top surface of the substrate being immersed in liquid, said apparatus comprising:
- a chuck unit to secure the substrate from the underside; and
liquid sealing means for sealing the underside of the substrate from exposure to the liquid. - View Dependent Claims (61, 62, 63, 64, 65, 66)
- a chuck unit to secure the substrate from the underside; and
Specification