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Methods and systems for binning defects detected on a specimen

  • US 20070133860A1
  • Filed: 12/14/2005
  • Published: 06/14/2007
  • Est. Priority Date: 12/14/2005
  • Status: Active Grant
First Claim
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1. A computer-implemented method for binning defects detected on a specimen, comprising:

  • comparing a test image to reference images, wherein the test image comprises an image of one or more patterned features formed on the specimen proximate to a defect detected on the specimen, and wherein the reference images comprise images of one or more patterned features associated with different regions of interest within a device being formed on the specimen; and

    if the one or more patterned features of the test image match the one or more patterned features of one of the reference images, assigning the defect to a bin corresponding to the region of interest associated with the one of the reference images.

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