APPARATUS AND METHOD FOR MEASURING AT LEAST ONE OF ARRANGEMENT AND SHAPE OF SHOTS ON SUBSTRATE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
First Claim
1. An apparatus for measuring at least one of arrangement and shape of shots formed on a substrate, said apparatus comprising:
- a scope configured to obtain an image of an alignment mark corresponding to a shot; and
a calculating device configured to calculate a difference between a position of the alignment mark in the image obtained by said scope and a designed position of the alignment mark, obtain a non-linear component of the calculated difference with respect to each of a plurality of conditions, calculate an index indicating a stability of the non-linear component of each shot with respect to each of the plurality of conditions, and select, from the plurality of conditions, a condition for obtaining the non-linear component based on the calculated indices.
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Accused Products
Abstract
An apparatus for measuring at least one of an arrangement and shape of shots formed on a substrate, comprises a scope configured to obtain an image of an alignment mark corresponding to a shot; and a calculating device configured to calculate a difference between a position of the alignment mark in the image obtained by the scope and a designed position of the alignment mark, obtain a non-linear component of the calculated difference with respect to each of a plurality of conditions, calculate an index indicating a stability of the non-linear component of each shot with respect to each of the plurality of conditions, and select, from the plurality of conditions, a condition for obtaining the non-linear component based on the calculated indices.
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Citations
16 Claims
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1. An apparatus for measuring at least one of arrangement and shape of shots formed on a substrate, said apparatus comprising:
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a scope configured to obtain an image of an alignment mark corresponding to a shot; and
a calculating device configured to calculate a difference between a position of the alignment mark in the image obtained by said scope and a designed position of the alignment mark, obtain a non-linear component of the calculated difference with respect to each of a plurality of conditions, calculate an index indicating a stability of the non-linear component of each shot with respect to each of the plurality of conditions, and select, from the plurality of conditions, a condition for obtaining the non-linear component based on the calculated indices. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of measuring at least one of arrangement and shape of shots formed on a substrate, said method comprising step of:
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obtaining an image of an alignment mark corresponding to a shot;
calculating a difference between a position of the alignment mark in the image and a designed position of the recorded alignment mark;
obtaining a non-linear component of the calculated difference with respect to each of a plurality of conditions;
calculating an index indicating a stability of the non-linear component of each shot with respect to each of the plurality of conditions; and
selecting, from the plurality of conditions, a condition for obtaining the non-linear component based on the calculated indices. - View Dependent Claims (9, 10, 11, 12)
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13. An apparatus for measuring at least one of arrangement and shape of shots formed on a substrate, said apparatus comprising:
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detecting means for detecting a position of an alignment mark corresponding to a shot; and
first calculating means for calculating a difference between the detected position of the alignment mark and a designed position of the alignment mark;
second calculating means for calculating a non-linear component of the calculated difference with respect to each of a plurality of conditions;
third calculating means for calculating an index indicating a stability of the non-linear component of each shot with respect to each of the plurality of conditions; and
selecting means for selecting, from the plurality of conditions, a condition for obtaining the non-linear component based on the calculated indices. - View Dependent Claims (14, 15)
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16. A method of measuring at least one of arrangement and shape of shots formed on a substrate, said method comprising steps of:
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detecting a position of an alignment mark corresponding to a shot; and
calculating a difference between the detected position of the alignment mark and a designed position of the alignment mark;
calculating a non-linear component of the calculated difference with respect to each of a plurality of conditions;
calculating an index indicating a stability of the non-linear component of each shot with respect to each of the plurality of conditions; and
selecting, from the plurality of conditions, a condition for obtaining the non-linear component based on the calculated indices.
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Specification