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APPARATUS AND METHOD FOR MEASURING AT LEAST ONE OF ARRANGEMENT AND SHAPE OF SHOTS ON SUBSTRATE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

  • US 20070133864A1
  • Filed: 12/07/2006
  • Published: 06/14/2007
  • Est. Priority Date: 12/08/2005
  • Status: Active Grant
First Claim
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1. An apparatus for measuring at least one of arrangement and shape of shots formed on a substrate, said apparatus comprising:

  • a scope configured to obtain an image of an alignment mark corresponding to a shot; and

    a calculating device configured to calculate a difference between a position of the alignment mark in the image obtained by said scope and a designed position of the alignment mark, obtain a non-linear component of the calculated difference with respect to each of a plurality of conditions, calculate an index indicating a stability of the non-linear component of each shot with respect to each of the plurality of conditions, and select, from the plurality of conditions, a condition for obtaining the non-linear component based on the calculated indices.

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