METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DEVICE AND VAPOR DEPOSITION SYSTEM

• US 20070134405A1
• Filed: 12/13/2006
• Published: 06/14/2007
• Est. Priority Date: 12/14/2005
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: TOKUNAGA, YUZO, FUKUDA, NAOTO, MASHIMO, SEIJI, OTSUKA, MANABU, YOSHIKAWA, TOSHIAKI
• Granted Patent: US 8,398,774 B2
• Time in Patent Office: Days
• US Class Current: 427/64
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: H10K 50/171 Electron injection layers
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition
• CPC Class Codes: H10K 71/30 Doping active layers, e.g. electron transporting layers
• CPC Class Codes: H10K 71/40 Thermal treatment, e.g. annealing in the presence of a solvent vapour

Abstract

Provided is a method of manufacturing an organic light emitting device including the step of forming an electron injection layer. The step of forming the electron injection layer includes the steps of: vaporizing in a container a dopant material as a raw material of a dopant; causing the vaporized dopant material to pass a heated medium between the container and the substrate; and forming the organic compound into the electron injection layer. According to the method the organic light emitting device which has high electron injection efficiency and can be driven at a low voltage can be obtained.

Claims

1. A method of manufacturing an organic light emitting device,

the organic light emitting device comprising:

a substrate;

an anode and a cathode provided on the substrate;

a light emitting layer provided between the anode and the cathode; and

an electron injection layer provided on a side of the cathode with respect to the light emitting layer, the electron injection layer comprising an organic compound and a dopant,

the method comprising the step of forming the electron injection layer,

wherein the step of forming the electron injection layer comprises the steps of;

vaporizing in a container a dopant material as a raw material of the dopant;

causing the vaporized dopant material to pass a heated medium between the container and the substrate; and

forming the organic compound into the electron injection layer.

2. The method of manufacturing an organic light emitting device according to claim 1, wherein the medium is heated by energization.

3. The method of manufacturing an organic light emitting device according to claim 1, wherein the medium is spaced apart from the dopant material.

4. The method of manufacturing an organic light emitting device according to claim 1, wherein a temperature of the medium is equal to or higher than the vaporizing temperature of the dopant material under vacuum.

5. The method of manufacturing an organic light emitting device according to claim 1, wherein a temperature of the medium is equal to or higher than 200°

C. and equal to or lower than 2000°

C.

6. The method of manufacturing an organic light emitting device according to claim 1, wherein the medium comprises a metal.

7. The method of manufacturing an organic light emitting device according to claim 6, wherein the metal comprises tungsten.

8. The method of manufacturing an organic light emitting device according to claim 1, wherein the dopant material comprises an alkali metal compound or an alkaline earth metal compound.

9. The method of manufacturing an organic light emitting device according to claim 8, wherein the dopant material comprises cesium carbonate.

10. The method of manufacturing an organic light emitting device according to claim 1, wherein the step of causing the vaporized dopant material to pass a heated medium comprises the step of accelerating decomposition of the dopant material.

11. A vapor deposition system comprising:

a container for containing a vapor deposition material therein;

heating means for vaporizing the vapor deposition material contained in the container;

a medium provided in a position between the container and a base material to be vapor-deposited where the vaporized vapor deposition material passes; and

a shielding member provided between the medium and the base material to be vapor-deposited, for shielding heat generated by the medium.

12. The vapor deposition system according to claim 11, wherein the shielding member is provided at an opening of the container and the medium is provided in a space defined by the shielding member and the container.

13. The vapor deposition system according to claim 12, wherein another shielding member having an opening is provided between the dopant material and the medium.