Three-dimensional thin-film microbattery

• US 20070134549A1
• Filed: 10/14/2004
• Published: 06/14/2007
• Est. Priority Date: 10/14/2003
• Status: Active Grant

• Current Assignee: Tel Aviv University Future Technology Development L.P. (Tel Aviv University)
• Original Assignee: TEL AVIV University Ramot Limited
• Inventors: Peled, Emanuel, Nathan, Menachem, Golodnitsky, Diana
• Granted Patent: US 7,527,897 B2
• Time in Patent Office: Days
• US Class Current: 429/149
• CPC Class Codes: H01G 9/15 Solid electrolytic capacitors H01G11/00 takes precedence
• CPC Class Codes: H01G 9/26 Structural combinations of electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices with each other
• CPC Class Codes: H01M 10/0436 Small-sized flat cells or batteries for portable equipment
• CPC Class Codes: H01M 10/0472 Vertically superposed cells with vertically disposed plates
• CPC Class Codes: H01M 10/052 Li-accumulators
• CPC Class Codes: H01M 10/0525 Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
• CPC Class Codes: H01M 10/056 characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
• CPC Class Codes: H01M 10/0565 Polymeric materials, e.g. gel-type or solid-type
• CPC Class Codes: H01M 10/058 Construction or manufacture
• CPC Class Codes: H01M 10/425 Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing printed circuits H05K1/00
• CPC Class Codes: H01M 2300/0088 Composites
• CPC Class Codes: H01M 4/0438 by electrochemical processing electroless electrochemical plating C23C18/54
• CPC Class Codes: H01M 4/0452 from solutions
• CPC Class Codes: H01M 4/133 Electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
• CPC Class Codes: H01M 4/136 Electrodes based on inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy
• CPC Class Codes: H01M 4/1393 of electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
• CPC Class Codes: H01M 4/1397 of electrodes based on inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy
• CPC Class Codes: H01M 4/5815 Sulfides
• CPC Class Codes: H01M 4/661 Metal or alloys, e.g. alloy coatings H01M4/669 take precedence
• CPC Class Codes: H01M 50/117 Inorganic material
• CPC Class Codes: H01M 50/131 : characterised by physical properties, e.g. gas permeability, size or heat resistance
• CPC Class Codes: H01M 6/181 : with polymeric electrolytes
• CPC Class Codes: H01M 6/40 : Printed batteries , e.g. thin film batteries
• CPC Class Codes: H01M 6/425 : Multimode batteries, batteries with "reserve cells"
• CPC Class Codes: Y02E 60/10 : Energy storage using batteries
• CPC Class Codes: Y02P 70/50 : Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10T 29/49115 : including coating or impregnating

Abstract

An electrical energy storage device (20) includes a microchannel plate (MCP) (22) having channels (24) formed therein, the channels having surface areas. Thin films (26) are formed over the surface areas and define an anode (34,38), a cathode (34,38), and a solid electrolyte (36) disposed between the anode and the cathode.

Claims

1. An electrical energy storage device, comprising:

a microchannel plate (MCP) having channels formed therein, the channels having surface areas; and

thin films formed over the surface areas and defining an anode, a cathode, and a solid electrolyte disposed between the anode and the cathode.

2. The device according to claim 1, wherein the MCP comprises a plurality of tubes, which are fused together and cut to define the MCP, the tubes having lumens, which define the channels.

3. The device according to claim 2, wherein the tubes comprise glass.

4. The device according to claim 2, wherein the tubes comprise carbon.

5. The device according to claim 1, wherein the MCP comprises a non-conductive material.

6. The device according to claim 5, wherein the non-conductive material comprises glass.

7. The device according to claim 1, wherein the MCP comprises a conductive material.

8. The device according to claim 7, wherein the conductive material comprises carbon.

9. The device according to any of claims 1-8, wherein the MCP has top and bottom surfaces, and wherein the thin films are further formed over at least one of the top and bottom surfaces.

10. The device according to any of claims 1-8, wherein the thin films comprise at least one current collector layer.

11. The device according to claim 10, wherein the current collector layer comprises at least one of nickel and copper.

12. The device according to any of claims 1-8, wherein the thin films comprise a final layer, which is formed so as to fill the channels.

13. The device according to any of claims 1-8, wherein the solid electrolyte comprises a hybrid polymer electrolyte.

14. The device according to any of claims 1-8, wherein one of the anode and the cathode comprises a lithium compound.

15. The device according to any of claims 1-8, wherein the cathode comprises a sulfur compound.

16. The device according to any of claims 1-8, wherein the thin films are fabricated so as to define a primary battery.

17. The device according to any of claims 1-8, wherein the thin films are fabricated so as to define a rechargeable battery.

18. The device according to claim 17, wherein the rechargeable battery comprises a Li-ion rechargeable battery

19. An electrical energy storage device, comprising:

a substrate having a multiplicity of cavities formed therein, the cavities having an aspect ratio greater than one and having surface areas; and

thin films formed over the surface areas and defining an anode, a cathode, and a solid electrolyte disposed between the anode and the cathode, the thin films comprising a final layer, which is formed so as to fill the channels.

20. The device according to claim 19, wherein the substrate comprises at least one of a non-conductive material, a semiconductor material, and a conductive material.

21. The device according to claim 19 or 20, wherein the substrate has top and bottom surfaces, and wherein the cavities are formed so as to pass through the substrate from the top to the bottom surface.

22. The device according to any of claims 19 or 20, wherein the substrate has top and bottom surfaces, and wherein the thin films are further formed over at least one of the top and bottom surfaces.

23. The device according to any of claims 19 or 20, wherein the thin films comprise at least one current collector layer.

24. The device according to any of claims 19 or 20, wherein the solid electrolyte comprises a hybrid polymer electrolyte.

25. An electrical energy storage device, comprising:

a substrate having a multiplicity of cavities formed therein, the cavities having an aspect ratio greater than one and having surface areas, the substrate defining a first electrode; and

thin films formed over the surface areas and defining a second electrode and a solid electrolyte disposed between the first and second electrodes.

26. The device according to claim 25, wherein the first electrode comprises an anode, and the second electrode comprises a cathode.

27. The device according to claim 25, wherein the first electrode comprises a cathode, and the second electrode comprises an anode.

28. The device according to claim 25, wherein the substrate comprises a carbon material.

29. The device according to claim 28, wherein the carbon material comprises diamond.

30. The device according to claim 25, wherein one of electrodes comprises a lithium compound.

31. The device according to claim 25, wherein the thin films comprise a final layer, which is formed so as to fill the cavities.

32. The device according to claim 25, wherein the thin films comprise at least one current collector layer.

33. The device according to any of claims 25-32, wherein the substrate has top and bottom surfaces, and wherein the cavities are formed so as to pass through the substrate from the top to the bottom surface.

34. The device according to any of claims 25-32, wherein the substrate has top and bottom surfaces, and wherein the thin films are further formed over at least one of the top and bottom surfaces.

35. An electrical energy storage device, comprising:

a tube, having a channel passing therethrough, the channel having a surface area; and

thin films formed over the surface area and defining an anode, a cathode, and a solid electrolyte disposed between the anode and the cathode.

36. A microelectronic device, comprising:

a substrate;

a microcircuit disposed on the substrate; and

a microbattery disposed on the substrate and coupled to provide electrical power to the microcircuit, the microbattery comprising;

a microchannel plate (MCP) having channels formed therein, the channels having surface areas; and

thin films formed over the surface areas and defining an anode, a cathode, and a solid electrolyte disposed between the anode and the cathode.

37. A microelectronic device, comprising:

a microchannel plate (MCP) having channels formed therein, the channels having surface areas;

a microcircuit disposed on the MCP; and

thin films formed over the surface areas of at least some of the channels and defining an anode, a cathode, and a solid electrolyte disposed between the anode and the cathode, the thin films being coupled to provide electrical power to the microcircuit.

38. A microelectronic device, comprising:

a microcircuit;

a substrate having a multiplicity of cavities formed therein, the cavities having an aspect ratio greater than one and having surface areas; and

thin films formed over the surface areas and defining an anode, a cathode, and a solid electrolyte disposed between the anode and the cathode, the thin films comprising a final layer, which is formed so as to fill the channels, the thin films being coupled to provide electrical power to the microcircuit.

39. The device according to claim 38, wherein the microcircuit is disposed on the substrate.

40. A microelectronic device, comprising:

a device substrate;

a microcircuit disposed on the device substrate; and

a microbattery disposed on the device substrate and coupled to provide electrical power to the microcircuit, the microbattery comprising;

a battery substrate having a multiplicity of cavities formed therein, the cavities having an aspect ratio greater than one and having surface areas, the substrate defining a first electrode; and

thin films formed over the surface areas and defining a second electrode and a solid electrolyte disposed between the first and second electrodes.

41. A microelectronic device, comprising:

a substrate having a multiplicity of cavities formed therein, the cavities having an aspect ratio greater than one and having surface areas, the substrate defining a first electrode;

a microcircuit disposed on the substrate; and

thin films formed over the surface areas of at least some of the channels and defining a second electrode and a solid electrolyte disposed between the first and second electrodes, the thin films and substrate being coupled to provide electrical power to the microcircuit.

42. A method for fabricating an electrical storage cell, comprising:

providing a microchannel plate (MCP) having channels formed therein, the channels having surface areas; and

forming thin films over the surface areas so as to define an anode, a cathode, and a solid electrolyte disposed between the anode and the cathode.

43. The method according to claim 42, wherein the MCP comprises a plurality of tubes, which are fused together and cut to define the MCP, the tubes having lumens, which define the channels.

44. The method according to claim 43, wherein the tubes comprise glass.

45. The method according to claim 43, wherein the tubes comprise carbon.

46. The method according to claim 42, wherein the MCP comprises a non-conductive material.

47. The method according to claim 46, wherein the non-conductive material comprises glass.

48. The method according to claim 42, wherein the MCP comprises a conductive material.

49. The method according to claim 48, wherein the conductive material comprises carbon.

50. The method according to any of claims 42-49, wherein the MCP has top and bottom surfaces, and wherein forming the thin films further comprises forming the thin films over at least one of the top and bottom surfaces.

51. The method according to any of claims 42-49, wherein forming the thin films comprises forming at least one current collector layer.

52. The method according to claim 51, wherein the current collector layer comprises at least one of nickel and copper.

53. The method according to any of claims 42-49, wherein forming the thin films comprises forming a final layer so as to fill the channels.

54. The method according to any of claims 42-49, wherein the solid electrolyte comprises a hybrid polymer electrolyte.

55. The method according to any of claims 42-49, wherein one of the anode and the cathode comprises a lithium compound.

56. The method according to any of claims 42-49, wherein the cathode comprises a sulfur compound.

57. The method according to any of claims 42-49, wherein forming the thin films comprises fabricating the thin films so as to define a primary battery.

58. The method according to any of claims 42-49, wherein forming the thin films comprises fabricating the thin films so as to define a rechargeable battery.

59. The method according to claim 58, wherein the rechargeable battery comprises a Li-ion rechargeable battery.

60. A method for fabricating an electrical storage cell, comprising:

providing a substrate having a multiplicity of cavities formed therein, the cavities having an aspect ratio greater than one and having surface areas; and

forming thin films over the surface areas so as to define an anode, a cathode, and a solid electrolyte disposed between the anode and the cathode, the thin films comprising a final layer, which is formed so as to fill the channels.

61. The method according to claim 60, wherein the substrate comprises at least one of a non-conductive material, a semiconductor material, and a conductive material.

62. The method according to claim 60 or 61, wherein the substrate has top and bottom surfaces, and wherein the cavities are formed so as to pass through the substrate from the top to the bottom surface.

63. The method according to claim 60 or 61, wherein the substrate has top and bottom surfaces, and wherein forming the thin films further comprises forming the thin films over at least one of the top and bottom surfaces.

64. The method according to claim 60 or 61, wherein the thin films comprise at least one current collector layer.

65. The method according to claim 60 or 61, wherein the solid electrolyte comprises a hybrid polymer electrolyte.

66. A method for fabricating an electrical storage cell, comprising:

providing a substrate having a multiplicity of cavities formed therein, the cavities having an aspect ratio greater than one and having surface areas, the substrate defining a first electrode; and

forming thin films over the surface areas so as to define a second electrode and a solid electrolyte disposed between the first and second electrodes.

67. The method according to claim 66, wherein the first electrode comprises an anode, and the second electrode comprises a cathode.

68. The method according to claim 66, wherein the first electrode comprises a cathode, and the second electrode comprises an anode.

69. The method according to claim 66, wherein the substrate comprises a carbon material.

70. The method according to claim 69, wherein the carbon material comprises diamond.

71. The method according to claim 66, wherein one of the electrodes comprises a lithium compound.

72. The method according to claim 66, wherein forming the thin films comprises forming a final layer so as to fill the cavities.

73. The method according to claim 66, wherein forming the thin films comprises forming at least one current collector layer.

74. The method according to any of claims 66-73, wherein the substrate has top and bottom surfaces, and wherein the cavities are formed so as to pass through the substrate from the top to the bottom surface.

75. The method according to any of claims 66-73, wherein the substrate has top and bottom surfaces, and wherein forming the thin films further comprises forming the thin films over at least one of the top and bottom surfaces.

76. A method for fabricating an electrical storage cell, comprising:

providing a tube having a channel passing therethrough, the channel having a surface area; and

forming thin films over the surface area so as to define an anode, a cathode, and a solid electrolyte disposed between the anode and the cathode.