METHODS OF MAKING ENERGY CONVERSION DEVICES WITH A SUBSTANTIALLY CONTIGUOUS DEPLETION REGIONS
First Claim
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1. A method of making an energy conversion device, the method comprising:
- forming a plurality of pores within a substrate;
forming a junction region within each of the plurality of pores, each of the junction regions has a depletion region and each of the plurality of pores defines an opening size in the substrate and a spacing from adjacent pores so that the depletion regions of each of the pores is at least substantially in contact with the depletion region of the pores which are adjacent;
forming a first portion of one or more side walls of at least one of the pores with a declination angle of less than about fifty-five degrees; and
forming a second portion of the one or more side walls of the at least one pore with a declination angle greater than about fifty-five degrees.
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Abstract
A method of making an energy conversion device includes forming a plurality of pores within a substrate and forming a junction region within each of the plurality of pores. Each of the junction regions has a depletion region and each of the plurality of pores defines an opening size in the substrate and a spacing from adjacent pores so that the depletion regions of each of the pores is at least substantially in contact with the depletion region of the pores which are adjacent.
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Citations
20 Claims
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1. A method of making an energy conversion device, the method comprising:
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forming a plurality of pores within a substrate;
forming a junction region within each of the plurality of pores, each of the junction regions has a depletion region and each of the plurality of pores defines an opening size in the substrate and a spacing from adjacent pores so that the depletion regions of each of the pores is at least substantially in contact with the depletion region of the pores which are adjacent;
forming a first portion of one or more side walls of at least one of the pores with a declination angle of less than about fifty-five degrees; and
forming a second portion of the one or more side walls of the at least one pore with a declination angle greater than about fifty-five degrees. - View Dependent Claims (2, 3, 4, 5, 6, 7, 9, 10, 11, 12)
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8. (canceled)
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13. A method of making an energy conversion device, the method comprising:
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providing a substrate;
forming a plurality of junction regions in the substrate, wherein a first portion of at least one of the junction regions has a declination angle of greater than about fifty-five degrees relative to a second portion of each of the junction regions, wherein each of the junction regions has a depletion region and each of the junction regions is spaced from the adjacent junction regions so that the depletion regions are at least substantially in contact with each other;
forming a first section of at least one of the plurality of junction regions with a declination angle less than about fifty-five degrees relative to the second portion of the at least one of the junction regions and forming a second section of the at least one of the plurality of junction regions with a declination angle greater than about fifty-five degrees relative to the second portion of the at least one of the junction regions. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. (canceled)
Specification