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METHODS OF MAKING ENERGY CONVERSION DEVICES WITH A SUBSTANTIALLY CONTIGUOUS DEPLETION REGIONS

  • US 20070134840A1
  • Filed: 10/25/2005
  • Published: 06/14/2007
  • Est. Priority Date: 10/25/2004
  • Status: Active Grant
First Claim
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1. A method of making an energy conversion device, the method comprising:

  • forming a plurality of pores within a substrate;

    forming a junction region within each of the plurality of pores, each of the junction regions has a depletion region and each of the plurality of pores defines an opening size in the substrate and a spacing from adjacent pores so that the depletion regions of each of the pores is at least substantially in contact with the depletion region of the pores which are adjacent;

    forming a first portion of one or more side walls of at least one of the pores with a declination angle of less than about fifty-five degrees; and

    forming a second portion of the one or more side walls of the at least one pore with a declination angle greater than about fifty-five degrees.

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