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THERMAL PROCESSING SYSTEM WITH ACROSS-FLOW LINER

  • US 20070137794A1
  • Filed: 01/26/2007
  • Published: 06/21/2007
  • Est. Priority Date: 09/24/2003
  • Status: Abandoned Application
First Claim
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1. An across-flow liner comprising:

  • a cylinder having a sealed end and an open end, the open end adapted to receive a batch wafer carrier having a plurality of wafer support positions therethrough, said cylinder having a plurality of vertically displaced exhaust ports or slots; and

    a first injector having a first series of axially aligned orifices, a first injector height and defining a first vertical axis, said first injector coupled to a first fluid supply and each of said first series of axially aligned orifices is in alignment with one of said plurality of wafer support positions.

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