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Exposure method, exposure apparatus, and device manufacturing method

  • US 20070139632A1
  • Filed: 12/19/2006
  • Published: 06/21/2007
  • Est. Priority Date: 04/25/2005
  • Status: Active Grant
First Claim
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1. An exposure method in which an object is exposed via a liquid, the method comprising:

  • a process in which a predetermined substance that adjusts specific resistance of the liquid is dissolved in the liquid and an liquid immersion area is formed by supplying the liquid in which the predetermined substance is dissolved on a film formed on the object; and

    a process in which exposure is performed by irradiating an exposure light on the object via the liquid and a predetermined pattern is formed.

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