Method and apparatus for reducing back-glass deflection in an interferometric modulator display device
First Claim
1. An interferometric modulator display comprising:
- a substrate;
an optical stack formed on the substrate;
a moveable reflective layer formed over the optical stack, the moveable reflective layer including one or more first posts extending therefrom; and
a backplate attached to the substrate, wherein the one or more first posts are operable to protect the moveable reflective layer by contacting at least a portion of the backplate if the backplate is deflected.
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Abstract
Methods and apparatus for reducing back-glass deflection in an interferometric modulator display device are provided. In one embodiment, an interferometric modulator display is provided that includes a including a substrate, an optical stack formed on the substrate, a moveable reflective layer formed over the optical stack, and a backplate attached to the substrate. The moveable reflective layer includes one or more first posts extending therefrom, in which one or more of the first posts are operable to protect the moveable reflective layer by contacting at least a portion of the backplate if the backplate is deflected.
107 Citations
25 Claims
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1. An interferometric modulator display comprising:
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a substrate;
an optical stack formed on the substrate;
a moveable reflective layer formed over the optical stack, the moveable reflective layer including one or more first posts extending therefrom; and
a backplate attached to the substrate, wherein the one or more first posts are operable to protect the moveable reflective layer by contacting at least a portion of the backplate if the backplate is deflected. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An interferometric modulator display comprising:
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a substrate means;
an optical stack means formed on the substrate means;
a moveable reflective layer means formed over the optical stack means, the moveable reflective layer means including one or more first post means extending therefrom; and
a recessed backplate means attached to the substrate means, the recessed backplate means including a non-recessed island means formed therein, wherein the one or more first post means are operable to protect the moveable reflective layer means by contacting the non-recessed island means if the recessed backplate means is deflected. - View Dependent Claims (18, 19, 20, 21, 22)
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23. A method of manufacturing an interferometric modulator display device, the method comprising:
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providing a substrate;
forming an optical stack on the substrate;
forming a moveable reflective layer over the optical stack, the moveable reflective layer including one or more first posts extending therefrom; and
attaching a recessed backplate to the substrate, the recessed backplate including a non-recessed island formed therein, wherein the one or more first posts are operable to protect the moveable reflective layer by contacting the non-recessed island if the recessed backplate is deflected. - View Dependent Claims (24, 25)
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Specification