Capacitively coupled resonator drive
First Claim
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1. A micro-machined device, comprising:
- a movable mass rotatably suspended from a frame by one or more hinges for rotation relative to the frame;
a DETF resonator suspended between the frame and reaction mass; and
a capacitor between the frame and movable mass.
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Abstract
An apparatus and method for a micro-machined device having a movable mass rotatably suspended from a frame by one or more hinges for rotation relative thereto frame. A DETF resonator is suspended between the frame and reaction mass, and a capacitor is provided between the frame and movable mass for transmitting a drive signal to the DETF resonator.
16 Citations
20 Claims
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1. A micro-machined device, comprising:
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a movable mass rotatably suspended from a frame by one or more hinges for rotation relative to the frame;
a DETF resonator suspended between the frame and reaction mass; and
a capacitor between the frame and movable mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A micro-machined device, comprising:
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a frame and pendulous mass formed of a substrate, the pendulous mass being substantially coplanar with and spaced away from the frame;
a hinge coupled between the frame and pendulous mass rotationally suspends the pendulous mass for relative rotational motion about a hinge axis in response to a force experienced along an input axis;
a DETF resonator suspended between the frame and the reaction mass in a push/pull relationship; and
a capacitor arranged between the frame and pendulous mass and spaced away from the hinge. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A micro-machined device, comprising:
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a frame formed of a silicon semiconductor substrate having first and second opposing substantially parallel spaced-apart planar surfaces;
a pendulous mass formed in the substrate coplanar with and spaced away from the frame by a gap;
a hinge coupled between the frame and pendulous mass rotationally suspends the pendulous mass for relative rotational motion about a hinge axis in response to a force experienced along an input axis;
a DETF resonator suspended between the frame and the reaction mass in a push/pull relationship; and
a capacitor spanning the gap between the frame and pendulous mass and arranged substantially crosswise of the hinge and input axes and spaced away from the hinge axis toward one of the first and second substrate surfaces. - View Dependent Claims (17, 18, 19, 20)
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Specification