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Methods and arrangement for creating a highly efficient downstream microwave plasma system

  • US 20070145020A1
  • Filed: 12/23/2005
  • Published: 06/28/2007
  • Est. Priority Date: 12/23/2005
  • Status: Active Grant
First Claim
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1. A plasma system comprising:

  • a microwave waveguide assembly; and

    a plasma tube assembly intersecting said microwave waveguide assembly, said plasma tube assembly having a plasma-sustaining region defined by an upstream plurality of plasma traps and a downstream plurality of plasma traps, wherein a first plasma trap among at least one of said upstream plurality of plasma traps and said downstream plurality of plasma traps includes a first corrugated surface, and a second plasma trap among at least one of said upstream plurality of plasma traps and said downstream plurali of plasma traps includes a second corrugated surface, said second corrugated surface facing said first corrugated surface.

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