Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectric Vacuum Vessel

• US 20070145023A1
• Filed: 03/12/2007
• Published: 06/28/2007
• Est. Priority Date: 04/16/2003
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Chen, Xing, Cowe, Andrew, Besen, Matthew, Holber, William, Shao, Shouqian, Trullin, Susan, Collins, Ronald
• Granted Patent: US 7,659,489 B2
• Time in Patent Office: Days
• US Class Current: 219/121.520
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H01J 37/32467 Material
• CPC Class Codes: H01J 37/32522 Temperature

Abstract

Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel'"'"'s channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.

Claims

1. A plasma ignition apparatus for a toroidal, inductively coupled plasma processing system, the apparatus comprising:

a vessel defining an enclosed channel; and

at least one capacitively coupled ignition electrode adjacent to the vessel and having a dimension aligned with an adjacent portion of the channel, a total length of the dimension of the at least one ignition electrode being greater than 10% of a length of the channel,

wherein the at least one ignition electrode can apply an electric field to a gas in the channel to initiate plasma discharge of the gas.

2. The apparatus of claim 1, wherein the channel defines a toroidal shape, and the total length of the channel is a length of one circuit around the toroidal shape.

3. The apparatus of claim 1, wherein the total length of the dimension of the at least one ignition electrode is greater than 20% of the total length of the channel.

4. The apparatus of claim 1, wherein the vessel consists of a dielectric material.

5. The apparatus of claim 1, wherein the vessel comprises at least one metallic portion, and at least one dielectric portion that fills a gap in the metallic portion.

6. The apparatus of claim 1, wherein the at least one ignition electrode comprises at least two ignition electrodes spaced from each other.

7. The apparatus of claim 6, wherein the at least two ignition electrodes are spaced along the channel.

8. The apparatus of claim 7, further comprising an ignition control circuit that is configured to remove the electric field after a plasma is ignited in the vessel.

9. The apparatus of claim 1, further comprising a reference electrode adjacent to the vessel, wherein the at least one ignition electrode and the reference electrode cooperate to apply an electric field to the gas in the channel to initiate plasma discharge of the gas.

10. The apparatus of claim 9, wherein the reference electrode is in thermal communication with the vessel to effectively limit a temperature of the vessel.

11. The apparatus of claim 9, wherein the vessel has at least four surfaces, the reference electrode covers at least a portion of three of the four surfaces, and the ignition electrode covers at least a portion of a remaining surface of the at least four surfaces of the vessel.

12. The apparatus of claim 1, wherein a cross section of the vessel has a straight portion.

13. The apparatus of claim 12, wherein a cross section of the vessel has a rectangular shape.

14. The apparatus of claim 12, wherein the vessel has at least one flat external surface, and the ignition electrode covers a portion of the flat external surface.

15. The apparatus of claim 14, wherein the flat external surface has an annular shape.

16. The apparatus of claim 1, wherein a cross section of the vessel has a curved portion.

17. The apparatus of claim 16, wherein a cross section of the vessel has an elliptical shape.

18. The apparatus of claim 1, further comprising at least one magnetic core that at least partially surrounds a portion of the vessel to support formation of an oscillatory electric field within the channel.

19. The apparatus of claim 1, wherein the vessel defines a linear shape, and has a proximate end and a distal end.

20. The apparatus of claim 1, wherein the at least one ignition electrode comprises a ceramic substrate and a conductive film formed on the ceramic substrate.

69. The apparatus of claim 1, comprising a control circuit that removes power from the at least one capacitively coupled ignition electrode after formation of an inductive plasma.

70. The apparatus of claim 1, wherein the at least one capacitively coupled ignition electrode is a heat sink segment in thermal communication with the vessel.

71. The apparatus of claim 1, comprising multiple capacitively coupled ignition electrodes one or more of which are in thermal communication with the vessel.

72. The apparatus of claim 6, wherein the ignition electrodes are in thermal communication with the vessel.

73. The apparatus of claim 1, comprising a light-blocking layer coating the vessel to block ultraviolet radiation generated by the plasma.

74. The apparatus of claim 73, wherein the light-blocking layer is a heat spreading layer and assists cooling of the vessel.

75. The apparatus of claim 1, comprising multiple capacitively coupled ignition electrodes distributed around the vessel to provide a distributed capacitive discharge that fills a substantial portion of the volume of the vessel.

76. The apparatus of claim 1, wherein the ignition electrode is formed from a metal film on a surface of the vessel that is made of a material that minimizes metal diffusion or electromigration.

77. The apparatus of claim 1, wherein the ignition electrode is made from a refractory materials.

78. The apparatus of claim 1, wherein the ignition electrode is made from titanium, tantalum, tungsten, an alloy thereof, compound conductive material or TiN.

21. A plasma ignition apparatus for a toroidal, inductively coupled plasma processing system, comprising:

a vessel defining an enclosed channel; and

at least one capacitively coupled ignition electrode adjacent to the vessel for application of an electric field to a gas in the channel, the at least one ignition electrode having an area greater than 1% of a total external surface area of the vessel.

22. The apparatus of claim 21, wherein the total area of the at least one ignition electrode is greater than 5% of the total external surface area of the vessel.

23. The apparatus of claim 21, wherein the total area of the at least one ignition electrode is greater than 10% of the total external surface area of the vessel.

24. The apparatus of claim 21, wherein the vessel consists of a dielectric material.

25. The apparatus of claim 21, further comprising a reference electrode, wherein the total surface area of the reference electrode and the at least one ignition electrode is in a range of 2% to 100% of a total internal surface area of the vessel.

26. The apparatus of claim 21, wherein the vessel comprises at least one metallic portion, and at least one dielectric portion that fills a gap in the metallic portion.

27. The apparatus of claim 21, wherein the channel defines a toroid.

28. A plasma ignition apparatus for a toroidal, inductively coupled plasma processing system, the apparatus comprising:

a vessel defining an enclosed channel; and

at least three capacitively coupled ignition electrodes adjacent to the vessel,

wherein the plurality of ignition electrodes can apply an electric field to a gas in the channel to initiate the plasma.

29. The apparatus of claim 28, wherein the channel defines a toroid, and the at least three ignition electrodes are distributed around the toroid.

30. The apparatus of claim 28, wherein the at least three ignition electrodes are distributed along the vessel.

31. A plasma ignition apparatus for a toroidal, inductively coupled plasma processing system, comprising:

a vessel having a gas input port and a gas output port and defining a channel for containing a gas; and

a capacitively coupled ignition electrode adjacent to the gas input port for application of an electric field to a flowing gas proximate to the input port of the vessel.

32. The apparatus of claim 31, wherein the channel defines a toroid.

33. The apparatus of claim 31, wherein the ignition electrode is positioned upstream from the gas input port.

34-51. -51. (canceled)

52. An inductively coupled plasma processing apparatus, comprising:

a dielectric toroidal vessel defining an enclosed channel;

at least one capacitively coupled ignition electrode adjacent to the vessel and having a dimension aligned with an adjacent portion of the channel, wherein a total length of the dimension of the at least one ignition electrode is greater than 10% of a length of the channel, whereby the at least one ignition electrode can apply an electric field to a gas in the channel to initiate a plasma discharge in the gas;

a transformer comprising a primary winding and a magnetic core that surrounds a portion of the vessel;

an AC power supply that supplies power to the primary winding to maintain a plasma in the toroidal vessel; and

a process vessel defining a process chamber that receives activated gas species from the vessel.

53-62. -62. (canceled)

63. A method for plasma processing in a toroidal inductively coupled plasma processing system, the method comprising:

providing a toroidal vessel defining an enclosed channel;

providing at least one capacitively coupled ignition electrode adjacent to the vessel and having a dimension aligned with an adjacent portion of the channel, wherein a total length of the dimension of the at least one ignition electrode is greater than 10% of a length of the channel;

initiating a plasma discharge in a gas in the channel by applying a voltage to the at least one ignition electrode;

providing a transformer comprising a primary winding and a magnetic core that surrounds a portion of the vessel;

supplying power to the primary winding from an AC power supply to maintain the plasma in the toroidal vessel; and

directing activated gas species from the toroidal vessel to a process chamber defined by a process vessel.

64. The method of claim 63, wherein igniting comprises igniting the plasma when the gas is essentially free of argon.

65. The method of claim 63, wherein igniting comprises igniting the plasma when the gas essentially has a process pressure and flow rate.

66-68. -68. (canceled)