SUBSTRATE WITH MULTI-LAYER INTERCONNECTION STRUCTURE AND METHOD OF MANUFACTURING THE SAME
First Claim
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1. A substrate with multi-layer interconnection structure, comprising:
- a substrate; and
a multi-layer interconnection structure formed on the substrate, wherein the multi-layer interconnection structure is adhered to the substrate in partial areas.
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Abstract
The invention provides a substrate with multi-layer interconnection structure, which includes a substrate and a multi-layer interconnection structure formed on the substrate. The multi-layer interconnection structure is adhered to the substrate in partial areas. The invention also provides a method of manufacturing and recycling such substrate and a method of packaging electronic devices by using such substrate. The invention also provides a method of manufacturing multi-layer interconnection devices.
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Citations
21 Claims
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1. A substrate with multi-layer interconnection structure, comprising:
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a substrate; and
a multi-layer interconnection structure formed on the substrate, wherein the multi-layer interconnection structure is adhered to the substrate in partial areas. - View Dependent Claims (2, 3, 4, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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5. A method of manufacturing a substrate with multi-layer interconnection structure, comprising:
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providing a substrate; and
forming a multi-layer interconnection structure on the substrate, wherein the multi-layer interconnection substrate is adhered to the substrate in partial areas. - View Dependent Claims (6, 7, 8)
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18. A method of manufacturing multi-layer interconnection devices, comprising:
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providing a substrate;
forming a multi-layer interconnection structure on the substrate, wherein the multi-layer interconnection substrate structure is adhered to the substrate in partial areas; and
cutting the multi-layer interconnection structure, so that a multi-layer interconnection device separates from the substrate after being cut. - View Dependent Claims (19, 20, 21)
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Specification