Probe card with improved transient power delivery
First Claim
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1. A method comprising:
- forming a decoupling capacitor between a probe card and a wafer under test.
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Abstract
In high current integrated circuit wafer test applications, a high capacitance density capacitor may be formed in association with a probe card at a position closer to a wafer under test. This reduces the power path impedance, improving transient power delivery of a probe card. That is because now the capacitance is positioned more closely to the wafer under test, reducing path impedance. The capacitance density may be at higher, improving transient power delivery.
42 Citations
21 Claims
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1. A method comprising:
forming a decoupling capacitor between a probe card and a wafer under test. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An electrical testing device comprising:
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a probe card;
a structure secured to said probe card;
probes extending from said structure; and
a capacitor formed in association with said structure. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method comprising:
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securing a structure to the probe side of a probe card; and
forming a capacitor having a capacitance density of at least 1.0 microfarads per square centimeter on said structure. - View Dependent Claims (14, 15, 16, 17)
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18. A probe card comprising:
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a plurality of probes; and
a decoupling capacitor having a capacitance density of greater than 1.0 microfarads per square centimeter. - View Dependent Claims (19, 20, 21)
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Specification