SYSTEMS AND METHODS OF CONTROLLING MICRO-ELECTROMECHANICAL DEVICES
First Claim
1. A control circuit for a Micro-Electro-Mechanical System (“
- MEMS”
), the control circuit comprising;
a variable capacitor having a fixed plate and a movable plate disposed in predetermined spatial relationship with respect to the fixed plate;
a switch comprising a source, a drain and a gate, the switch being associated with one of the fixed and movable plates of the capacitor, the switch further being arranged to selectively connect the one of the fixed and movable plates to a voltage source; and
a voltage generator associated with the switch, the voltage generator being configured to control current flow into the one of the fixed and movable plates of the capacitor.
4 Assignments
0 Petitions
Accused Products
Abstract
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
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Citations
23 Claims
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1. A control circuit for a Micro-Electro-Mechanical System (“
- MEMS”
), the control circuit comprising;
a variable capacitor having a fixed plate and a movable plate disposed in predetermined spatial relationship with respect to the fixed plate;
a switch comprising a source, a drain and a gate, the switch being associated with one of the fixed and movable plates of the capacitor, the switch further being arranged to selectively connect the one of the fixed and movable plates to a voltage source; and
a voltage generator associated with the switch, the voltage generator being configured to control current flow into the one of the fixed and movable plates of the capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- MEMS”
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11. A display device comprising:
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a plurality of variable capacitors each having a fixed plate and a movable plate disposed in predetermined spatial relationship with respect to the fixed plate;
a plurality of switches each associated with a selected one of the fixed and movable plates of the capacitors and which is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source; and
a plurality of voltage generators configured to alter current flow into the selected one of the fixed and movable plates of the respective capacitor when the switch is closing.
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12. A method of making a control circuit for a Micro-Electro-Mechanical System (“
- MEMS”
), the method comprising;
depositing a silicon layer on a substrate;
patterning the deposited silicon layer;
depositing a structural material on the silicon layer;
patterning the deposited structural material to form a source beam, a drain structure, and a gate structure;
plating a non-corroding metal on the deposited structural material; and
etching away at least some of the silicon layer. - View Dependent Claims (13, 14, 15, 16, 17, 18)
- MEMS”
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19. A method of making a control circuit for a Micro-Electro-Mechanical System (“
- MEMS”
), the method comprising;
forming a variable capacitor having a fixed plate and movable plate disposed in predetermined spatial relationship with respect to the fixed plate;
forming a switch which has a source, a drain and a gate, which is associated with a selected one of the fixed and movable plates of the capacitor and which is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source;
forming a circuit associated with the switch configured to control current flow into the selected one of the fixed and movable plates of the capacitor.
- MEMS”
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20. A control circuit for a Micro-Electro-Mechanical System, the control circuit comprising:
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a variable capacitor having a fixed plate and a movable plate disposed in predetermined spatial relationship with respect to the fixed plate;
means for selectively connecting one of the fixed and movable plates with a voltage source; and
means for controlling current flow into the selected one of the fixed and movable plates of the capacitor. - View Dependent Claims (21, 22)
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23. A control circuit for a MEMS (Micro-Electro-Mechanical System) comprising:
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variable capacitor means having a fixed plate and movable plate disposed in predetermined spatial relationship with respect to the fixed plate, for operative association with and motivating an arrangement associated with the MEMS;
switch means which has a source, a drain and a gate, which is associated with a selected one of the fixed and movable plates of the capacitor for selectively connecting the selected one of the fixed and movable plates with a voltage source and for inducing a change in distance between the fixed and movable plates;
circuit means associated with the semiconductor switch for attenuating current injection into the selected one of the fixed and movable plates of the capacitor.
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Specification