Apparatus for fabricating flat panel display, and apparatus and method for detecting quantity of static electricity thereof

• US 20070146621A1
• Filed: 05/15/2006
• Published: 06/28/2007
• Est. Priority Date: 12/28/2005
• Status: Active Grant

• Current Assignee: LG Display Co., Ltd.
• Original Assignee: LG Philips LCD Company Limited (LG Display Co., Ltd.)
• Inventors: Yeom, Young
• Granted Patent: US 9,170,441 B2
• Time in Patent Office: Days
• US Class Current: 349/187
• CPC Class Codes: C23C 16/458 characterised by the method used for supporting substrates in the reaction chamber
• CPC Class Codes: C23C 16/4582 Rigid and flat substrates, e.g. plates or discs C23C16/4581 takes precedence
• CPC Class Codes: C23C 16/4583 the substrate being supported substantially horizontally
• CPC Class Codes: C23C 16/4585 Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: G02F 1/1309 Repairing; Testing

Abstract

A fabricating apparatus of a flat panel display device includes lift pins for lifting a substrate, a susceptor through which the lift pins pass, and a static electricity quantity detector for detecting a quantity of static electricity on the substrate by sensing when the susceptor separates from the substrate by sensing a traveled distance of the susceptor when the susceptor is separated from the substrate.

Claims

1. A fabricating apparatus of a flat panel display device, comprising:

lift pins for lifting a substrate;

a susceptor through which the lift pins pass; and

a static electricity quantity detector for detecting a quantity of static electricity on the substrate by sensing when the susceptor separates from the substrate by sensing a traveled distance of the susceptor when the susceptor separates from the substrate.

2. The fabricating apparatus according to claim 1, wherein the lift pins are deployed to lift a substrate as the substrate descends.

3. The fabricating apparatus according to claim 1, wherein the static electricity quantity detector includes:

a light emitter for transmitting light to a space between the susceptor and the substrate during descent of the susceptor;

a light receiver for receiving the transmitted light;

a traveled-distance sensing part for sensing the traveled distance of the susceptor; and

a controller for detecting the quantity of static electricity quantity on the substrate by use of a sensed traveled-distance value from the traveled-distance sensing part and a detected light amount from the light receiver.

4. The fabricating apparatus according to claim 3, wherein the controller stores the sensed traveled-distance value when a detected light amount is greater than a pre-set reference light amount value, and determines the static electricity quantity in accordance with the stored sensed traveled-distance value.

5. The fabricating apparatus according to claim 4, wherein the controller determines the detected static electricity quantity by corresponding the stored sensed traveled-distance value to a detected static electricity quantity in a lookup table in a memory.

6. The fabricating apparatus according to claim 5, further comprising:

a display part for displaying the static electricity quantity detected by the controller.

7. An apparatus for detecting a quantity of static electricity quantity on a susceptor in deposition equipment, comprising:

a light emitter for transmitting light through a space between the susceptor and a substrate during descent of the susceptor;

a light receiver for receiving the transmitted light;

a traveled-distance sensing part for sensing a traveled distance; and

a controller for detecting a static electricity quantity on the substrate by use of a sensed traveled-distance value and a detected light amount from the light receiver.

8. The apparatus for detecting a quantity of static electricity quantity according to claim 7, wherein the traveled distance is the traveled distance of the susceptor.

9. The apparatus for detecting a quantity of static electricity quantity according to claim 7, wherein the controller stores the sensed traveled-distance value when the detected light amount is greater than a pre-set designated reference light amount value and detects the static electricity quantity in accordance with the stored sensed traveled-distance value.

10. The apparatus for detecting the static electricity quantity according to claim 9, wherein the controller determines the detected static electricity quantity by corresponding the stored sensed traveled-distance value to a detected static electricity quantity in a lookup table in a memory.

11. The apparatus for detecting the static electricity quantity according to claim 10, further comprising:

a display part for displaying the static electricity quantity detected by the controller.

12. A method for detecting a static electricity quantity on a susceptor in deposition equipment having a plurality of lift pins for lifting a substrate and the susceptor through which the lift pin passes, comprising:

transmitting light to a space formed between the susceptor and the substrate upon movement of the susceptor, and simultaneously sensing a traveled distance of the susceptor; and

detecting a static electricity quantity on the substrate by use of the sensed traveled-distance value and the transmitted light amount.

13. The method for detecting the static electricity quantity according to claim 12, wherein the detecting a static electricity quantity includes:

storing the sensed traveled-distance value when the transmitted light amount is greater than a pre-set designated reference light amount value; and

determining the detected quantity of static electricity by corresponding the stored sensed traveled-distance value to a detected quantity of static electricity in a lookup table in a memory.

20. The method for detecting the static electricity quantity according to claim 12, wherein the detecting a static electricity quantity includes:

storing the sensed traveled-distance value when the transmitted light amount is greater than a pre-set designated reference light amount value; and

determining the detected quantity of static electricity by corresponding the stored sensed traveled-distance value to a detected quantity of static electricity in a lookup table in a memory.

14. A fabricating apparatus of a flat panel display device, comprising:

lift pins for lifting a substrate, the lift pins being able to ascend and descend;

a susceptor through which the lift pins pass; and

a static electricity quantity detector for detecting a static electricity quantity on the substrate by sensing when the susceptor is separated from the substrate due to an ascent of the lift pins and by sensing a traveled distance of the lift pins when the susceptor is separates from the substrate.

15. The fabricating apparatus according to claim 14, wherein the static electricity quantity detector includes:

a light emitter for transmitting light to a space between the susceptor and the substrate during ascent of the lift pins;

a light receiver for receiving the transmitted light;

a traveled-distance sensing part for sensing the traveled distance of the lift pins; and

a controller for detecting the static electricity quantity on the substrate by use of a sensed traveled-distance value and a detected light amount from the light receiver part.

16. The fabricating apparatus according to claim 15, wherein the controller stores a sensed traveled-distance value when the detected light amount is greater than a pre-set designated reference light amount value and detects the static electricity quantity in accordance with the stored sensed traveled-distance value.

17. The fabricating apparatus according to claim 15, wherein the controller determines the detected quantity of static electricity by corresponding the stored sensed traveled-distance value to a detected quantity of static electricity in a lookup table in a memory.

18. The fabricating apparatus according to claim 15, further comprising:

a display part for displaying quantity of the static electricity detected by the controller.

19. A method for detecting a static electricity quantity on a susceptor in deposition equipment having a plurality of lift pins for lifting a substrate and the susceptor through which the lift pins pass, comprising:

transmitting light to a space formed between the susceptor and the substrate upon movement of the lift pins, and simultaneously sensing a traveled distance of the lift pins; and

detecting a static electricity quantity on the substrate by use of the sensed traveled-distance value and the transmitted light amount.