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PHOTOVOLTAIC CONTACT AND WIRING FORMATION

  • US 20070148336A1
  • Filed: 11/06/2006
  • Published: 06/28/2007
  • Est. Priority Date: 11/07/2005
  • Status: Abandoned Application
First Claim
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1. A method for forming metal contact and wiring on a sheet, comprising:

  • depositing an antireflective coating layer on the surface of the sheet;

    forming a pattern of a photoresist material for contact metallization on the surface of the sheet;

    curing the photoresist material;

    etching the antireflective coating layer through the pattern of the photoresist material;

    cleaning the surface of the sheet;

    depositing a film stack having the first metal material and a second metal material over the surface of the sheet inside a physical vapor deposition chamber;

    stripping the photoresist material off the surface of the sheet;

    annealing the sheet for forming good contact between the film stack and the sheet; and

    depositing a bulk metal material over the surface of the sheet.

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