Fluorinated coatings

• US 20070148390A1
• Filed: 12/27/2005
• Published: 06/28/2007
• Est. Priority Date: 12/27/2005
• Status: Abandoned Application

• Current Assignee: Specialty Coating Systems Inc.
• Original Assignee: Specialty Coating Systems Inc.
• Inventors: Kumar, Rakesh
• Application Number:
  US11/318,920
• Publication Number:
  US 20070148390A1
• Time in Patent Office: Days
• US Class Current: 428/36.910
• CPC Class Codes: A61L 27/34 Macromolecular materials
• CPC Class Codes: A61L 29/085 Macromolecular materials
• CPC Class Codes: A61L 31/10 Macromolecular materials
• CPC Class Codes: B05D 1/60 Deposition of organic layers from vapour phase vapour phase deposition in general C23C14/00, C23C16/00
• CPC Class Codes: C07C 23/18 Polycyclic halogenated hydrocarbons
• CPC Class Codes: C07C 25/22 with condensed rings
• CPC Class Codes: C09D 165/04 Polyxylylenes
• CPC Class Codes: H01L 21/0212 the material being fluoro carbon compounds, e.g.(CFx) n, (CHxFy) n or polytetrafluoroethylene
• CPC Class Codes: H01L 21/02263 deposition from the gas or vapour phase
• CPC Class Codes: H01L 21/3127 Layers comprising fluoro (hydro)carbon compounds, e.g. polytetrafluoroethylene
• CPC Class Codes: H05K 3/284 for encapsulating mounted components H05K1/185 takes precedence
• CPC Class Codes: Y10T 428/1393 Multilayer [continuous layer]

Abstract

Conformal coatings are disclosed. A fluorinated thin film, for example, is formed by vapor phase polymerization on a variety of sensitive surfaces that may include electronic and automotive sensors, biochips, implantable sensors and biomedical devices.

Claims

1. A coating on at least a portion of at least one surface of an article, comprising at least one layer of a polymeric film of

having a thickness in a range from about 500 Å

to about 25 μ

m, where n is at least 2 and R1 and R2 is at least one of a halogen and hydrogen.

2. The coating of claim 1, wherein the article comprises an electronic device.

3. The coating of claim 1, wherein the article is an electronic device selected from the group consisting of an LED cluster, a heating element, a map sensor, a combustible gas sensor, a tire pressure monitoring system, and a fuel level sensor.

4. The coating of claim 1, wherein the article is a component of a hybrid fuel system.

5. The coating of claim 1, wherein the article is a component of an automotive electronic system, a high frequency electronic system, a microelectromechanical system, or an electrowetting lens system.

6. The coating of claim 1, wherein the article is a nanotube.

7. The coating of claim 1, wherein the article is a silicon wafer via or a wafer bond pad.

8. The coating of claim 1, wherein the article comprises an implantable medical device.

9. The coating of claim 1, wherein the article is an implantable medical device selected from the group consisting of a stent, an implantable sensor, and a catheter.

10. The coating of claim 1, wherein the article is a biochip or a component thereof.

11. The coating of claim 1, wherein R1 comprises hydrogen.

12. The coating of claim 11, wherein R2 comprises hydrogen.

13. The coating of claim 1, wherein R1 comprises fluorine.

14. The coating of claim 13, wherein R2 comprises fluorine.

15. A method of coating a surface of an article comprising:

vaporizing a fluorinated paracyclophane dimer to produce a vaporized monomeric species; and

polymerizing the monomeric species on at least a portion of the surface to produce a conformal coating comprising a polymeric material having a thickness in a range from about 500 Å

to about 25 μ

m, the polymeric material having a formula

where n is at least 2 and R1 and R2 comprises hydrogen or a halogen.

16. The method of claim 15, wherein the fluorinated paracyclophane dimer is selected from the group consisting of octofluoro-[2,2]-paraxylylene and perfluoro-[2,2]-paraxylylene.

17. The method of claim 16, wherein at least one of R1 and R2 is fluorine.

18. The method of claim 17, wherein R1 and R2 is fluorine.

19. The method of claim 16, wherein at least one of R1 and R2 is hydrogen.

20. The method of claim 16, wherein the article comprises a nanoscale structure.

21. The method of claim 16, wherein the article comprises an electronic device.

22. The method of claim 16, wherein the article is an electronic device selected from the group consisting of a map sensor, a component of a tire pressure monitoring system, an LED cluster, a component of an automotive electronic system, and a component of an electrowetting lens system.

23. The method of claim 15, wherein the article comprises an implantable medical device.

24. The method of claim 15, wherein the article is a device selected from the group consisting of a stent, an implantable sensor, a biochip, and a catheter or components thereof.