NITRIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
First Claim
1. A method of manufacturing a nitride semiconductor device by means of vapor deposition, the method comprising the steps of:
- forming an n-type nitride semiconductor layer on a nitride crystal growth substrate;
forming an active layer on the n-type nitride semiconductor layer;
forming a first p-type nitride semiconductor layer on the active layer;
forming a micro-structured current diffusion pattern on the first p-type nitride semiconductor layer, the current diffusion pattern being made of an insulation material; and
forming a second p-type nitride semiconductor layer on the first p-type nitride semiconductor layer having the current diffusion pattern formed thereon.
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Abstract
The present invention provides a nitride semiconductor device. The nitride semiconductor device comprises an n-type nitride semiconductor layer formed on a nitride crystal growth substrate. An active layer is formed on the n-type nitride semiconductor layer. A first p-type nitride semiconductor layer is formed on the active layer. A micro-structured current diffusion pattern is formed on the first p-type nitride semiconductor layer. The current diffusion pattern is made of an insulation material. A second p-type nitride semiconductor layer is formed on the first p-type nitride semiconductor layer having the current diffusion pattern formed thereon.
30 Citations
7 Claims
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1. A method of manufacturing a nitride semiconductor device by means of vapor deposition, the method comprising the steps of:
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forming an n-type nitride semiconductor layer on a nitride crystal growth substrate;
forming an active layer on the n-type nitride semiconductor layer;
forming a first p-type nitride semiconductor layer on the active layer;
forming a micro-structured current diffusion pattern on the first p-type nitride semiconductor layer, the current diffusion pattern being made of an insulation material; and
forming a second p-type nitride semiconductor layer on the first p-type nitride semiconductor layer having the current diffusion pattern formed thereon. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification