Lithographic apparatus and device manufacturing method
First Claim
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1. A lithographic projection apparatus, comprising:
- a projection system configured to project a patterned radiation beam onto a target portion of a substrate;
a positioning structure configured to move the substrate relative to the projection system during exposure by the patterned radiation beam;
a pivotable mirror configured to move the patterned radiation beam relative to the projection system during at least one pulse of the patterned radiation beam; and
an actuator configured to oscillatingly pivot the mirror according to an oscillation timing that substantially corresponds to a pulse frequency of a radiation system and such that the patterned radiation beam is scanned in substantial synchronism with the movement of the substrate during the at least one pulse.
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Abstract
Apparatus and methods for compensating for the movement of a substrate in a lithographic apparatus during a pulse of radiation include providing a pivotable mirror configured to move a patterned radiation beam incident on the substrate in substantial synchronism with the substrate.
80 Citations
37 Claims
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1. A lithographic projection apparatus, comprising:
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a projection system configured to project a patterned radiation beam onto a target portion of a substrate;
a positioning structure configured to move the substrate relative to the projection system during exposure by the patterned radiation beam;
a pivotable mirror configured to move the patterned radiation beam relative to the projection system during at least one pulse of the patterned radiation beam; and
an actuator configured to oscillatingly pivot the mirror according to an oscillation timing that substantially corresponds to a pulse frequency of a radiation system and such that the patterned radiation beam is scanned in substantial synchronism with the movement of the substrate during the at least one pulse. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A device manufacturing method, comprising:
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moving a substrate relative to a projection system that projects a patterned radiation beam onto a substrate during exposure;
oscillatingly pivoting a pivotable mirror according to an oscillation timing that substantially corresponds to a pulse frequency of the patterned radiation beam so as to alter a path of the patterned radiation beam in substantial synchronism with movement of the substrate; and
projecting the patterned radiation beam onto the substrate. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32)
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33. An apparatus comprising a projection system, the projection system having:
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a pivotable mirror configured to receive a patterned beam of radiation; and
an actuator functionally connected to the pivotable mirror and configured to oscillatingly pivot the mirror. - View Dependent Claims (34, 35, 36, 37)
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Specification