INTEGRATED ON-CHIP NMR AND ESR DEVICE AND METHOD FOR MAKING AND USING THE SAME

• US 20070152669A1
• Filed: 12/29/2005
• Published: 07/05/2007
• Est. Priority Date: 12/29/2005
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Park, Chang-Min, Ramanathan, Shriram, Morrow, Patrick, Cadien, Kenneth
• Granted Patent: US 7,274,191 B2
• Time in Patent Office: Days
• US Class Current: 324/321
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G01N 24/08 by using nuclear magnetic resonance G01N24/12 takes precedence
• CPC Class Codes: G01N 24/10 by using electron paramagnetic resonance G01N24/12 takes precedence
• CPC Class Codes: G01R 33/302 Miniaturized sample handling arrangements for sampling small quantities, e.g. flow-through microfluidic NMR chips

Abstract

An embodiment of the invention relates to an integrated on-chip NMR or ESR device for performing chemical analysis and medical diagnostics. Specifically, the device contains, on a single substrate, a sample holding space, a magnet for generating a static magnetic field across the sample holding space and a microcoil for generating an excitation magnetic field across sample holding space. The magnetic fields are able to create NMR or ESR within a sample in the sample holding space and collect and/or process the signals from the NMR or ESR. The substrate may comprise an array of microcoils and sample holding spaces for performing multiple NMR or ESR analysis, such as multiple DNA analysis. Other embodiments of the invention relate methods for fabrication such devices and methods for performing NMR or ESR analysis using such devices.

Claims

1. A device comprising a substrate, the substrate comprising:

a space for holding a liquid sample;

a magnet capable of generating a static magnetic field across at least a portion of the space; and

a microcoil capable of generating an excitation magnetic field across at least a portion of the space;

wherein the static magnetic field and the excitation magnetic field are capable of creating Nuclear Magnetic Resonance (NMR) or Electron Spin Resonance (ESR) within a liquid sample contained in the space; and

wherein the microcoil is capable of detecting signals from the NMR or ESR,

wherein the substrate comprises an array of spaces for holding liquid samples and wherein each of at least a portion of the microcoils is capable of generating an excitation magnetic field across one of the spaces.

2. The device of claim 1, wherein the substrate comprises silicon, glass, a polymeric material, metal, or a combination thereof.

3. The device of claim 1, wherein the substrate comprises an integrated circuit, a MEMS device, a microarray, a macroarray, a multi-well plate, a microfluidic device, or a combination thereof.

4. The device of claim 1, wherein the substrate comprises circuitry capable of amplifying or processing the NMR and ESR signals detected by the microcoil.

5. The device of claim 1, wherein the space for holding a liquid sample comprises a reservoir, a microchannel, an opening, a surface, or a combination thereof.

6. The device of claim 5, wherein the space for holding a liquid sample is a microchannel, the microchannel having two or more inlets, at least one outlet, and at least one mixing section where liquid samples introduced from the two or more inlets can be mixed.

7. The device of claim 1, wherein the space for holding a liquid sample has a volume of from about 1.0 nL to about 1.0 mL.

8. The device of claim 7, wherein the space for holding a liquid sample has a volume of from about 10 nL, to about 10 μ

L.

9. The device of claim 1, wherein the magnet comprises a permanent magnet or an electromagnet.

10. The device of claim 1, wherein the magnet is placed near or adjacent to the space for holding a liquid sample.

11. The device of claim 1, wherein the magnet is capable of generating a static magnetic field strength of from about 0.01 Tesla (T) to about 30 T.

12. The device of claim 1, wherein the magnet is capable of generating a static magnetic field strength of from about 0.01 T to about 0.5 T.

13. The device of claim 1, wherein the magnet is capable of generating a static magnetic field strength of from about 0.5 T to about 5 T.

14. The device of claim 1, wherein the microcoil comprises copper, aluminum, gold, silver, or a mixture thereof.

15. The device of claim 1, wherein the microcoil is placed near or adjacent to the space for holding a liquid sample.

16. The device of claim 1, wherein the microcoil is a Solenoid type coil.

17. The device of claim 1, wherein the microcoil is a planar spiral coil.

18. The device of claim 17, wherein the planar spiral microcoil comprises an inner-area dimension of from about 10 μ

m to 10 mm, about 1 to 100 windings, and a winding separation of about 1 μ

m to 500 μ

m.

19. The device of claim 18, wherein the planar spiral microcoil comprises an inner-area dimension of from about 100 μ

m to 1.0 mm, about 1 to 30 windings, and a winding separation of about 10 μ

m to 100 μ

m.

20. The device of claim 1, wherein the microcoil has a cross-section dimension of from about 0.01 μ

m to about 100 μ

m.

21. A method comprising:

fabricating a space for holding a liquid sample on a substrate;

attaching a magnet on the substrate, the magnet being capable of generating a static magnetic field across at least a portion of the space; and

fabricating a microcoil on the substrate, the microcoil being capable of generating an excitation magnetic field across at least a portion of the space;

wherein the static magnetic field and the excitation magnetic field are capable of creating Nuclear Magnetic Resonance (NMR) or Electron Spin Resonance (ESR) within a liquid sample contained in the space; and

wherein the microcoil is capable of detecting signals from the NMR or ESR,

wherein the substrate comprises an array of spaces for holding liquid samples and wherein each of at least a portion of the microcoils is capable of generating an excitation magnetic field across one of the spaces.

22. The method of claim 21, wherein the fabricating of the space, the attaching of the magnet, or the fabricating of the microcoil comprises combining two or more smaller substrates to form the substrate.

23. The method of claim 21, wherein the substrate comprises silicon, glass, a polymeric material, metal, or a combination thereof.

24. The method of claim 21, wherein the substrate comprises an integrated circuit, a MEMS device, a microarray, a macroarray, a multi-well plate, a microfluidic device, or a combination thereof.

25. The method of claim 21, further comprising forming circuitry on the substrate, the circuitry being capable of amplifying or processing the NMR and ESR signals detected by the microcoil.

26. The method of claim 21, wherein the space for holding a liquid sample comprises a reservoir, a microchannel, an opening, a surface, or a combination thereof.

27. The method of claim 26, wherein the space for holding a liquid sample is a microchannel, the microchannel having two or more inlets, at least one outlet, and at least one mixing section where liquid samples introduced from the two or more inlets can be mixed.

28. The method of claim 21, wherein the magnet comprises a permanent magnet or an electromagnet.

29. The method of claim 21, wherein the magnet is placed near or adjacent to the space for holding a liquid sample.

30. The method of claim 21, wherein the microcoil comprises of copper, aluminum, gold, silver, or a mixture thereof.

31. The method of claim 21, wherein the microcoil is placed near or adjacent to the space for holding a liquid sample.

32. The method of claim 21, wherein the microcoil is a Solenoid type coil.

33. The method of claim 21, wherein the microcoil is a planar spiral microcoil.

34. A method comprising:

providing a device comprising a substrate, the substrate comprising a space for holding a liquid sample, a magnet capable of generating a static magnetic field across at least a portion of the space, and a microcoil capable of generating an excitation magnetic field across at least a portion of the space;

providing a liquid sample within the space;

using the magnet to generate a static magnetic field across at least a portion of the sample;

using the microcoil to generate an excitation magnetic field across at least a portion of the sample;

using the microcoil to detect signals from the sample,

wherein the substrate comprises an array of spaces for holding liquid samples and wherein each of at least a portion of the microcoils is capable of generating an excitation magnetic field across one of the spaces.

35. The method of claim 34, wherein the static magnetic field and the excitation magnetic field create Nuclear Magnetic Resonance (NMR) within the liquid sample.

36. The method of claim 34, wherein the static magnetic field and the excitation magnetic field create Electron Spin Resonance (ESR) within the liquid sample.

37. The method of claim 34, further comprising generating an NMR spectroscopy or ERS spectroscopy of the liquid sample.

38. The method of claim 34, wherein the providing a liquid sample within the space comprises introducing two or more different samples into the space.

39. A device comprising a substrate, the substrate comprising:

a space for holding a liquid sample; and

an array of microcoils capable of generating excitation magnetic fields across at least a portion of the space;

wherein the excitation magnetic fields are capable of creating NMR or ESR within a liquid sample contained in the space when the sample is immersed in an static magnetic field; and

wherein the microcoils are capable of detecting signals from the NMR or ESR,

wherein the substrate comprises an array of spaces for holding liquid samples and wherein each of at least a portion of the microcoils is capable of generating an excitation magnetic field across one of the spaces.

40. The device of claim 39, wherein the substrate comprises silicon, glass, a polymeric material, metal, or a combination thereof.

41. The device of claim 39, wherein the substrate comprises an integrated circuit, a MEMS device, a microarray, a macroarray, a multi-well plate, a microfluidic device, or a combination thereof.

42. The device of claim 39, wherein the substrate comprises circuitry capable of amplifying or processing the NMR and ESR signals detected by the microcoil.

43. The device of claim 39, wherein each of at least a portion of the microcoils is capable of generating an excitation magnetic field across a distinct portion of the space.

45. The device of claim 39, wherein the space for holding a liquid sample comprises a reservoir, a microchannel, an opening, a surface, or a combination thereof.

46. The device of claim 39, wherein the space for holding a liquid sample has a volume of from about 1.0 nL to about 10 mL.

47. The device of claim 39, wherein the substrate comprises an array of spaces for holding liquid samples and wherein each of the spaces has a volume of from about 10 nl to about 100 μ

L.

48. The device of claim 39, wherein the microcoils comprise copper, aluminum, gold, silver, or a mixture thereof.

49. The device of claim 39, wherein the microcoils are placed near or adjacent to the space for holding a liquid sample.

50. The device of claim 39, wherein at least a portion of the microcoils are Solenoid type coils.

51. The device of claim 39, wherein at least portion of the microcoils are planar spiral coils.

52. The device of claim 51, wherein each of the planar spiral microcoils comprises an inner-area dimension of from about 10 μ

m to 10 mm, about 1 to 100 windings, and a winding separation of about 1 μ

m to 500 μ

m.

53. The device of claim 52, wherein each of the planar spiral microcoils comprises an inner-area dimension of from about 100 μ

m to 1.0 mm, about 1 to 30 windings, and a winding separation of about 10 μ

m to 100 μ

m.

54. The device of claim 39, wherein each of the microcoils has a cross-section dimension of from about 0.01 μ

m to about 100 μ

m.

55. The device of claim 39, wherein the static magnetic field is generated by an external magnet.

56. The device of claim 39, wherein the substrate comprises a magnet capable of generating a static magnetic field across at least a portion of the space for holding a liquid sample.

57. The device of claim 56, wherein the magnet comprises a permanent magnet or an electromagnet.

58. The device of claim 56, wherein the magnet is placed near or adjacent to the space for holding a liquid sample.

59. The device of claim 56, wherein the magnet is capable of generating a static magnetic field strength of from about 0.01 Tesla (T) to about 30 T.

60. The device of claim 56, wherein the magnet is capable of generating a static magnetic field strength of from about 0.01 T to about 0.5 T.

61. The device of claim 56, wherein the magnet is capable of generating a static magnetic field strength of from about 0.5 T to about 5 T.

44. (canceled)

62. A method comprising:

providing a device comprising a substrate, the substrate comprising a space for holding a liquid sample and an array of microcoils capable of generating an excitation magnetic field across at least a portion of the space;

providing a liquid sample within the space;

generating a static magnetic field across at least a portion of the sample;

using at least a portion of the microcoils to generate excitation magnetic fields across at least a portion of the sample; and

using at least a portion of the microcoils to detect signals from the sample,

wherein the substrate comprises an array of spaces for holding liquid samples and wherein each of at least a portion of the microcoils is capable of generating an excitation magnetic field across one of the spaces.

63. The method of claim 62, wherein each of at least a portion of the microcoils is used to generate an excitation magnetic field across a distinct portion of the space.

65. The method of claim 62, wherein the static magnetic field is generated by an external magnet.

66. The method of claim 62, wherein the substrate comprises a magnet capable of generating a static magnetic field across at least a portion of the space for holding a liquid sample.

67. The method of claim 66, wherein the magnet comprises a permanent magnet or an electromagnet.

68. The method of claim 62, wherein the static magnetic field and the excitation magnetic fields create Nuclear Magnetic Resonance (NMR) within the liquid sample.

69. The method of claim 62, wherein the static magnetic field and the excitation magnetic fields create Electron Spin Resonance (ESR) within the liquid sample.

70. The method of claim 62, further comprising generating an NMR spectroscopy or ERS spectroscopy of the liquid sample.

71. The method of claim 62, wherein each of at least a portion of the microcoils is associated with a biomolecule.

72. The method of claim 71, wherein the biomolecule is a DNA and is capable of hybridizing with a complementary DNA.

73. The method of claim 72, wherein NMR signals from the DNA hybridization is detected by at least a portion of the microcoils.

74. A method of claim 62, wherein the method is a method for disease detection.

64. (canceled)