Probe card capable of multi-probing
First Claim
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1. A probe card capable of multi-probing, comprising:
- a printed circuit board (PCB) having a plurality of contact portions disposed on a first surface thereof; and
a test module having a plurality of test boards,wherein each of the test boards includes at least one probing portion on which a plurality of needles are arrayed and the test module selects one of the test boards and probes semiconductor chips formed on a semiconductor wafer through the needles arrayed on the probing portion of the selected test board.
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Abstract
A probe card capable of multi-probing includes a print circuit board having a plurality of contact portions and a test module having a plurality of test boards. Each of the test boards includes at least one probing portion on which a plurality of needles are arrayed. The test module selects one of the test boards and probes semiconductor chips formed on a semiconductor wafer through the needles arrayed on the probing portion of the selected test board.
9 Citations
17 Claims
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1. A probe card capable of multi-probing, comprising:
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a printed circuit board (PCB) having a plurality of contact portions disposed on a first surface thereof; and a test module having a plurality of test boards, wherein each of the test boards includes at least one probing portion on which a plurality of needles are arrayed and the test module selects one of the test boards and probes semiconductor chips formed on a semiconductor wafer through the needles arrayed on the probing portion of the selected test board. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A probe card capable of multi-probing, comprising:
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a PCB having a plurality of contact portions disposed on a first surface thereof; a test module having a plurality of test boards each having at least one probing portion on which a plurality of needles are arrayed, the test board being provided at a side surface with an insertion groove; and a fixing member for fixing each test board and disposed on the first surface of the PCB. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification